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Measurement of the dynamic response of MEMS thermal actuators based on blurred still images by wavelet transform

机译:基于小波变换的模糊静止图像的MEMS热执行器动态响应测量。

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摘要

A novel method to experimentally determine the dynamic response of MEMS thermal actuators based on blurred still images of motion is presented. The apex displacement of thermal actuators proves to be a first-order linear system, whose dynamic response is depended on the system coefficient. In the frequency domain, the system coefficient of actuators excited by sinusoidal wave can be obtained from the fitted curve of vibration amplitude against frequency. An improved wavelet transform detection algorithm is proposed to acquire the vibration amplitude from blurred images taken by an ordinary camera. Compared with the conventional optical measurement method, the proposed method uses only still images instead of complex laser and optical reflecting systems, which has great potential for wide application. For the actuator in this study, the measured response time by blurred images and high-speed camera method are 14.87 and 15.25 ms with a deviation of 2.5%, which indicates the proposed method can obtain sufficient accurate results without sophisticated equipment and high cost.
机译:提出了一种基于运动的静止静止图像实验确定MEMS热执行器动态响应的新方法。热执行器的顶点位移被证明是一阶线性系统,其动态响应取决于系统系数。在频域中,可以从振动幅度与频率的拟合曲线获得正弦波激励的执行器的系统系数。提出了一种改进的小波变换检测算法,以从普通相机拍摄的模糊图像中获取振动幅度。与传统的光学测量方法相比,该方法仅使用静止图像而不是复杂的激光和光学反射系统,具有广阔的应用前景。对于本研究中的执行器,通过模糊图像和高速相机方法测得的响应时间分别为14.87和15.25 ms,偏差为2.5%,这表明该方法无需复杂的设备和昂贵的成本即可获得足够的准确结果。

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