• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文期刊>Science and Technology of Advanced Materials >Self-organized one-axis-oriented PZT films with nano-domain structure
【24h】

Self-organized one-axis-oriented PZT films with nano-domain structure

机译：具有纳米域结构的自组织单轴取向PZT膜

获取原文
获取原文并翻译 | 示例
           
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

{100} One-axis-oriented PZT films with a thickness of 2 μm were obtained on (111)Pt/TiO_2/SiO_2/(100)Si substrates by metal organic chemical vapor deposition (MOCVD). These were obtained irrespective of the film thickness up to 2 μm and with a Zr/(Zr + Ti) ratio from 0.20 to 0.75. This was found to be due to the higher growth rate of these orientation grains than {110} and {111)} orientation grains. These films had columnar grains 50-100 nm in width. Moreover, they were found to include 90° nano-domains 10-20 nm in width. Dielectric constant, ε_r and the field induced-strain were maximum around a Zr/(Zr + Ti) ratio of 0.5, which was in good agreement with previous reports on sintered bodies with 100 times larger domains. This means that the domain size had any effect on ε_r or field-induced strain.
机译：{100}通过金属有机化学气相沉积（MOCVD）在（111）Pt / TiO_2 / SiO_2 /（100）Si衬底上获得厚度为2μm的单轴取向PZT膜。不论膜厚最大为2μm且Zr /（Zr + Ti）之比为0.20至0.75，都可以获得这些。发现这是由于这些取向晶粒的生长速率高于{110}和{111）}取向晶粒的缘故。这些膜具有宽度为50-100nm的柱状晶粒。此外，发现它们包括宽度为10-20nm的90°纳米域。 Zr /（Zr + Ti）之比约为0.5时，介电常数ε_r和场感应应变最大，这与先前关于具有100倍大畴的烧结体的报道非常吻合。这意味着畴尺寸对ε_r或场致应变有任何影响。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号