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首页> 外文期刊>Sensors and Actuators >Flexible sensorial system based on capacitive chemical sensors integrated with readout circuits fully fabricated on ultra thin substrate
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Flexible sensorial system based on capacitive chemical sensors integrated with readout circuits fully fabricated on ultra thin substrate

机译：基于电容式化学传感器的柔性传感器系统，集成了在超薄基板上完全制造的读出电路

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摘要

In this paper we present the design and fabrication of a fully flexible sensorial system, composed of three different sensor units implemented on an ultrathin polyimide substrate of 8 u.m thick. Each unit is composed by a capacitive chemical sensor integrated with readout electronics. The sensors are parallel plate capacitors with the top electrode properly patterned to allow analytes diffusion into the dielectric that acts as chemical interactive material. Three different polymers, poly(tetrafluoroethene) (PTFE), poly(methyl 2-methylpropenoate) (PMMA) and benzocyclobutene (BCB), were used as dielectrics. A ring oscillator circuit, implemented with polysilicon thin film transistors (PS-nTFT), was used to convert the capacitance variations into frequency shifts. The electronic tests show oscillating frequencies of about 211 ± 2 kHz and negligible frequency shifts under different bending radius conditions. Furthermore, system response to some alcohols concentrations (Methanol, ethanol, 1 -butanol, and 1 -propanol) is reported and data analysis proves that the system is able to discriminate methanol from ethanol.
机译：在本文中，我们介绍了一种完全柔性的传感系统的设计和制造，该系统由在8 µm厚的超薄聚酰亚胺衬底上实现的三个不同的传感器单元组成。每个单元都由一个集成了读出电子设备的电容式化学传感器组成。传感器是平行板电容器，其顶部电极已正确构图，以允许分析物扩散到充当化学相互作用材料的电介质中。三种不同的聚合物，聚（四氟乙烯）（PTFE），聚（2-甲基丙烯酸甲酯）（PMMA）和苯并环丁烯（BCB）被用作电介质。使用由多晶硅薄膜晶体管（PS-nTFT）实现的环形振荡器电路将电容变化转换为频移。电子测试表明，在不同的弯曲半径条件下，振荡频率约为211±2 kHz，而频移可忽略不计。此外，报告了系统对某些醇浓度（甲醇，乙醇，1-丁醇和1-丙醇）的响应，数据分析证明该系统能够从乙醇中区分出甲醇。

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  • 来源
    《Sensors and Actuators》 |2011年第2期|p.768-774|共7页
  • 作者

    E. Zampetti; L. Maiolo; A. Pecora; F. Maita; S. Pantalei; A. Minotti; A. Valletta; M. Cuscuna; A. Macagnano; G. Fortunato; A. Bearzotti;

  • 作者单位

    Consiglio Nazionale deile Ricerche - Istituto per la Microelettronica e Microsistemi (CNR-IMM). Via del Fosso del Cavaiiere 100,00133 Roma, Italy;

    Consiglio Nazionale deile Ricerche - Istituto per la Microelettronica e Microsistemi (CNR-IMM). Via del Fosso del Cavaiiere 100,00133 Roma, Italy;

    Consiglio Nazionale deile Ricerche - Istituto per la Microelettronica e Microsistemi (CNR-IMM). Via del Fosso del Cavaiiere 100,00133 Roma, Italy;

    Consiglio Nazionale deile Ricerche - Istituto per la Microelettronica e Microsistemi (CNR-IMM). Via del Fosso del Cavaiiere 100,00133 Roma, Italy;

    Consiglio Nazionale deile Ricerche - Istituto per la Microelettronica e Microsistemi (CNR-IMM). Via del Fosso del Cavaiiere 100,00133 Roma, Italy;

    Consiglio Nazionale deile Ricerche - Istituto per la Microelettronica e Microsistemi (CNR-IMM). Via del Fosso del Cavaiiere 100,00133 Roma, Italy;

    Consiglio Nazionale deile Ricerche - Istituto per la Microelettronica e Microsistemi (CNR-IMM). Via del Fosso del Cavaiiere 100,00133 Roma, Italy;

    Consiglio Nazionale deile Ricerche - Istituto per la Microelettronica e Microsistemi (CNR-IMM). Via del Fosso del Cavaiiere 100,00133 Roma, Italy;

    Consiglio Nazionale deile Ricerche - Istituto per la Microelettronica e Microsistemi (CNR-IMM). Via del Fosso del Cavaiiere 100,00133 Roma, Italy;

    Consiglio Nazionale deile Ricerche - Istituto per la Microelettronica e Microsistemi (CNR-IMM). Via del Fosso del Cavaiiere 100,00133 Roma, Italy;

    Consiglio Nazionale deile Ricerche - Istituto per la Microelettronica e Microsistemi (CNR-IMM). Via del Fosso del Cavaiiere 100,00133 Roma, Italy;

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  • 正文语种 eng
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  • 关键词

    flexible sensor; ultra thin substrate; capacitive sensor; flexible electronics; alcohols;

    机译：柔性传感器;超薄基板;电容式传感器;柔性电子产品;酒精;

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