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首页> 外文期刊>IEEE sensors journal >Novel Wideband Eddy Current Device for the Conductivity Measurement of Semiconductors
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Novel Wideband Eddy Current Device for the Conductivity Measurement of Semiconductors

机译：用于半导体电导率测量的新型宽带涡流装置

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摘要

We report on the development and application of a brand-new contactless method based on eddy currents with a view to designing a generic apparatus for the characterization of some transport properties of a large range of semiconductors. The eddy current probe, constituted of a coil connected to a transmission line, interacts with the semiconductor wafer under inspection. The innovative approach of this letter consists in measuring the impedance of the coil by reflectometry using a broadband multicarrier test signal, i.e., containing multiple frequencies. An analytical electromagnetic model of the coil-wafer interaction is then used to estimate the conductivity of the wafer. This process results in a new contactless conductivity measurement system that exhibits a very wide conductivity measurement range and allows the characterization of a large variety of semiconductor materials. The device is also very fast potentially allowing the measurement of transport properties of semiconductors in fast transient conditions. As a practical example, the performance of our device is demonstrated by estimating the conductivity of a set of crystalline silicon wafers.
机译：我们报告了一种基于涡流的全新非接触式方法的开发和应用，目的是设计一种用于表征大范围半导体某些传输特性的通用装置。由连接到传输线的线圈构成的涡流探头与被检查的半导体晶片相互作用。这封信的创新方法在于使用宽带多载波测试信号（即包含多个频率）通过反射法测量线圈的阻抗。然后使用线圈-晶片相互作用的分析电磁模型来估计晶片的电导率。该过程导致了一种新的非接触式电导率测量系统，该系统具有非常宽的电导率测量范围，并且可以表征多种半导体材料。该设备还非常快，可能允许在快速瞬态条件下测量半导体的传输特性。作为一个实际示例，我们通过估算一组晶体硅晶片的电导率来证明我们设备的性能。

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