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首页> 外文期刊>Sensors Journal, IEEE >Cantilever Resonator With Integrated Actuation and Sensing Fabricated Using a Single Step Lithography
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Cantilever Resonator With Integrated Actuation and Sensing Fabricated Using a Single Step Lithography

机译：悬臂谐振器采用单步光刻技术进行集成的致动和传感

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摘要

Micro- and nano-mechanical resonators have been proposed for a variety of applications ranging from mass sensing to signal processing. Often their actuation and/or detection involve external subsystems that are much larger than the resonator itself. We have designed a simple microcantilever resonator with integrated sensor and actuator, facilitating the integration of large arrays of resonators. This unique design can be manufactured with a low-cost fabrication process, involving just a single step of lithography. The bilayer cantilever of gold and silicon dioxide is used as piezoresistive sensor as well as thermal bimorph actuator. The ac current used for actuation and the dc current used for piezoresistive detection are separated in the frequency-domain using a bias-tee circuit configuration. The resonant response is measured by detecting the second harmonic of the actuation current using a lock-in amplifier.
机译：已经提出了微机械和纳米机械谐振器，用于从质量传感到信号处理的各种应用。它们的致动和/或检测通常涉及比谐振器本身大得多的外部子系统。我们设计了一个带有集成传感器和执行器的简单微悬臂谐振器，以促进大型谐振器阵列的集成。这种独特的设计可以通过低成本的制造工艺来制造，仅涉及光刻的一个步骤。金和二氧化硅的双层悬臂用作压阻传感器以及热双压电晶片执行器。使用偏置三通电路配置在频域中将用于激励的交流电流和用于压阻检测的直流电流分开。谐振响应通过使用锁定放大器检测致动电流的二次谐波来测量。

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