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首页> 外文期刊>IEEE sensors journal >A High-Resolution MEMS Piezoelectric Strain Sensor for Structural Vibration Detection
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A High-Resolution MEMS Piezoelectric Strain Sensor for Structural Vibration Detection

机译：用于结构振动检测的高分辨率MEMS压电应变传感器

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This paper presents the modeling, fabrication, and testing of a high-performance dynamic strain sensor. Using microelectromechanical systems (MEMS) technology, ZnO piezoelectric microsensors are directly fabricated on silicon and steel substrates. The sensors are intended to be used as point sensors for vibration sensing without putting an extra burden on the host structures. A model that incorporates piezoelectric effects into an RC circuit, representing the sensor architecture, is developed to describe the voltage output characteristics of the piezoelectric microsensors. It is shown that the sensitivity of microplanar piezoelectric sensors that utilize the $e_{31}$ effect is linearly proportional to sensor thickness but unrelated to sensor area. Sensor characterization was performed on a cantilever beam cut from a fabricated silicon wafer. The experimental data indicate that the overall sensor and circuit system is capable of resolving better than 40.3 nanostrain time domain signal at frequencies above 2 kHz. The corresponding noise floor is lower than 200 femto-strain per root hertz and the sensitivity, defined as the sensor voltage output over strain input, is calculated to be 340 V/$varepsilon$ . Micro ZnO piezoelectric sensors fabricated on steel hard disk drive suspensions also show excellent results. The sensor not only has a better signal-to-noise ratio but also detects more vibration information than the combination of two laser-doppler-vibrometer measurements in different directions.
机译：本文介绍了高性能动态应变传感器的建模，制造和测试。利用微机电系统（MEMS）技术，ZnO压电微传感器直接在硅和钢基底上制造。该传感器旨在用作振动感应的点传感器，而不会给主机结构带来额外的负担。开发了一种将压电效应纳入代表传感器结构的RC电路的模型，以描述压电微传感器的电压输出特性。结果表明，利用$ e_ {31} $效应的微平面压电传感器的灵敏度与传感器厚度成线性比例，但与传感器面积无关。在从制造的硅晶片切出的悬臂梁上进行传感器表征。实验数据表明，在2 kHz以上的频率下，整个传感器和电路系统能够比40.3纳米应变的时域信号更好地分辨。相应的本底噪声低于每根赫兹200飞秒的应变，灵敏度（定义为通过应变输入输出的传感器电压）经计算为340 V / varepsilon $。在钢制硬盘驱动器悬架上制造的微型ZnO压电传感器也显示出出色的结果。该传感器不仅具有更好的信噪比，而且还可以检测到两个方向不同的激光多普勒振动计相结合的振动信息。

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