A Low-Power/Low-Noise Readout Circuit for Integrated Capacitive Sensors

Panagiotis D. Dimitropoulos; Dimitris P. Karampatzakis; Georgios D. Panagopoulos; Georgios I. Stamoulis

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A Low-Power/Low-Noise Readout Circuit for Integrated Capacitive Sensors

机译：用于集成电容传感器的低功耗/低噪声读出电路

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A switched-capacitor integrated system is presented in this work that attains sub-fF measurement resolution in integrated capacitive sensors, with 1.5-kHz bandwidth and 50-(mu)W average power consumption in continuous function mode. The proposed design employs a pair of nonoverlapping clocks and an operational transconductance amplifier (OTA) that can be made as simple as a basic differential pair. The system exhibits 0.8percent linearity error and 0.01 fF/(deg C) temperature drift. It is appropriate for differential, absolute, and ratiometric capacitance measurements, and shows robustness against interconnection parasitics, transistor dimensional mismatch, and process variations, which are an important feature in the case of sensor-die CMOS postprocessing.

机译：在这项工作中提出了一种开关电容器集成系统，该系统在集成电容传感器中达到了低于fF的测量分辨率，在连续功能模式下具有1.5kHz的带宽和50μW的平均功耗。所提出的设计采用一对不重叠的时钟和一个运算跨导放大器（OTA），该放大器可以像基本差分对一样简单。该系统表现出0.8％的线性误差和0.01 fF /（℃）的温度漂移。它适用于差分，绝对和比例电容测量，并显示出抗互连寄生性，晶体管尺寸失配和工艺变化的鲁棒性，这在传感器芯片CMOS后处理的情况下是重要特征。

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来源
《IEEE sensors journal》 |2006年第3期|p.755-769|共15页
作者
Panagiotis D. Dimitropoulos; Dimitris P. Karampatzakis; Georgios D. Panagopoulos; Georgios I. Stamoulis;
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作者单位

Institute of Microelectronics and Microsystems, 1014 Lausanne, Switzerland;

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原文格式 PDF
正文语种 eng
中图分类计量学;
关键词
ASIC; capacitive sensor; CMOS analog IC; low power; switched capacitor;

机译：ASIC;电容传感器;CMOS模拟IC;低功耗;开关电容器;

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专利

1. A CMOS low-noise and low-power charge sampling integrated circuit for capacitive detector/sensor interfaces [J] . Tedja S., Van der Speigel J. IEEE Journal of Solid-State Circuits . 1995,第2期

机译：用于电容检测器/传感器接口的CMOS低噪声和低功耗电荷采样集成电路
2. Flexible sensorial system based on capacitive chemical sensors integrated with readout circuits fully fabricated on ultra thin substrate [J] . E. Zampetti, L. Maiolo, A. Pecora, Sensors and Actuators . 2011,第2期

机译：基于电容式化学传感器的柔性传感器系统，集成了在超薄基板上完全制造的读出电路
3. Fully Integrated Low-Noise Readout Circuit with Automatic Offset Cancellation Loop for Capacitive Microsensors [J] . Dong-il Dan Cho, Haryong Song, Hyoungho Ko, Sensors . 2015,第10期

机译：完全集成的低噪声读出电路，具有用于电容式微传感器的自动失调消除环路
4. A monolithic, low-noise, capacitive readout interface circuit for CMOS-MEMS resonator-based gravimetric chemical gas sensors [C] . Sutri N.Y., Dennis J.O., Khir M. H. Md, AFRICON . 2015

机译：用于基于CMOS-MEMS谐振器的重量化学气体传感器的单片，低噪声，电容性读出接口电路
5. Design of Low-power, Low-noise Readout Circuits for Sensory Microsystems. [D] . Lin, Yingkan. 2014

机译：用于传感微系统的低功耗，低噪声读出电路的设计。
6. Fully Integrated Low-Noise Readout Circuit with Automatic Offset Cancellation Loop for Capacitive Microsensors [O] . Haryong Song, Yunjong Park, Hyungseup Kim, 2015

机译：完全集成的低噪声读出电路具有用于电容式微传感器的自动失调消除环路
7. Systematic Design of Analog Low-Power Circuits in CMOS Using an Example of Capacitive Sensor Readout [O] . Bechen Benjamin 2008

机译：采用电容传感器读出实例的CmOs模拟低功耗电路系统设计

A Low-Power/Low-Noise Readout Circuit for Integrated Capacitive Sensors

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