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首页> 外文期刊>IEEE sensors journal >Investigation of Broadband Characteristics of Multi-Frequency Piezoelectric Micromachined Ultrasonic Transducer (MF-pMUT)
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Investigation of Broadband Characteristics of Multi-Frequency Piezoelectric Micromachined Ultrasonic Transducer (MF-pMUT)

机译：多频压电微机械超声传感器（MF-pMUT）的宽带特性研究

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摘要

Multi-frequency ultrasonic transducers are highly promising devices in biomedical applications for providing both good imaging resolution and large detection depth. However, most conventional multi-frequency ultrasonic transducers are designed through integrating multiple single-frequency transducers, with complicated fabrication process, imperfect beam profiles, and limited bandwidths. In this paper, a single-element multi-frequency piezoelectric micromachined ultrasonic transducer (MF-pMUT) is proposed and investigated in terms of broadband property. Three rectangular-diaphragm MF-pMUTs with different length-to-width aspect ratios are fabricated with the microelectromechanical system (MEMS) technology and characterized both in air and underwater. All MF-pMUT samples exhibit at least two broad bands. After optimization of the aspect ratio, two smooth bands with comparable sound pressure level are achieved, providing -6 dB bandwidths of 112%/38% and corresponding central frequencies of 0.615 MHz/1.63 MHz. Benefited from such broadened multi-frequency property and simple structure design, the proposed MF-pMUT shows a great potential in ultrasonic detection, diagnosis, and imaging applications as well as wireless acoustic energy transmission.
机译：多频超声换能器是生物医学应用中非常有前途的设备，可提供良好的成像分辨率和较大的检测深度。然而，大多数常规的多频超声换能器是通过集成多个单频换能器而设计的，具有复杂的制造工艺，不完善的光束轮廓和有限的带宽。本文提出了一种单元素多频压电微加工超声换能器（MF-pMUT），并从宽带特性的角度进行了研究。利用微机电系统（MEMS）技术制造了三个具有不同长宽比的矩形膜片MF-pMUT，它们在空中和水下都具有特征。所有MF-pMUT样品均显示至少两个宽带。在优化纵横比之后，获得了两个具有相似声压级的平滑带，提供了112％/ 38％的-6 dB带宽和0.615 MHz / 1.63 MHz的相应中心频率。受益于如此宽泛的多频特性和简单的结构设计，所提出的MF-pMUT在超声检测，诊断和成像应用以及无线声能传输方面显示出巨大潜力。

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