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ZnO/MoS

机译：氧化锌/硫化钼

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摘要

Humidity sensors have wide range of applications. In this paper, an inorganic hybrid thin film of molybdenum disulphide (MoS2)/zinc oxide (ZnO) was prepared as the sensing layer to develop a resistive humidity sensor containing aluminium electrodes on Si/SiO2 substrate. The composite was analyzed using scanning electron microscopy, transmission electron microscopy, X-ray photoelectron spectroscopy, and X-ray diffraction for their morphology and crystalline information. The sensor was exposed to various levels of relative humidity (RH) at room temperature and the response was found to be far better than pristine MoS2 or ZnO-based humidity sensors with the maximum response being 301 times at 85% RH. The results were reproducible with fast response and recovery, stable over a month with negligible hysteresis. A cost effective prototype was built on printed circuit board, and the data were acquired and transmitted to smartphone wirelessly using a Wi-Fi module (ESP 8266) interfaced to FRDM-KL25Z development platform. The Android application developed for the smartphone had the capability to switch ON/OFF the sensor device over Wi-Fi. Thus, our sensor device holds a great potential to develop an ultrasensitive, low power, low cost, and fast humidity sensor capable of indoor air quality monitoring in home automation systems (smart home).
机译：湿度传感器具有广泛的应用范围。本文制备了二硫化钼（MoS2）/氧化锌（ZnO）的无机杂化薄膜作为传感层，以开发在Si / SiO2基板上包含铝电极的电阻式湿度传感器。使用扫描电子显微镜，透射电子显微镜，X射线光电子能谱和X射线衍射对复合材料进行了形态和晶体信息分析。该传感器在室温下暴露于各种相对湿度（RH），发现其响应远优于原始的MoS2或ZnO基湿度传感器，在85％RH时，最大响应为301倍。结果是可再现的，具有快速的响应和恢复能力，一个月内稳定，滞后可以忽略不计。在印刷电路板上构建了具有成本效益的原型，并使用连接到FRDM-KL25Z开发平台的Wi-Fi模块（ESP 8266）将数据采集并无线传输到智能手机。为智能手机开发的Android应用程序具有通过Wi-Fi开启/关闭传感器设备的功能。因此，我们的传感器设备具有开发超灵敏，低功耗，低成本和快速湿度传感器的巨大潜力，该传感器能够在家庭自动化系统（智能家居）中监控室内空气质量。

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