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首页> 外文期刊>IEEE sensors journal >A Low Power Bridge-Type Gas Sensor With Enhanced Sensitivity to Ethanol by Sandwiched ZnO/Au/ZnO Film Sputtered in O₂ Atmosphere
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A Low Power Bridge-Type Gas Sensor With Enhanced Sensitivity to Ethanol by Sandwiched ZnO/Au/ZnO Film Sputtered in O₂ Atmosphere

机译：低功率桥式气体传感器，通过在O 2气氛中溅射的夹层ZnO / Au / ZnO膜具有增强的乙醇敏感性

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摘要

This paper proposes a ZnO-based gas sensor fabricated entirely by micro-electro-mechanical system (MEMS) process. The gas sensor is based on a narrow bridge-type micro-heater, which achieve ultra-low static power consumption. A physical vapor deposition (PVD) sputtering method was employed in depositing n-type ZnO-based sensing materials on this heater. Ethanol, a common VOC gas was selected as a choice of gas to be tested, and to enhance the performance of ethanol, a thin layer of metal additive Au is buried between two ZnO film layers in an atmosphere of O-2 to form a "sandwiched" ZnO/Au/ZnO structure. The morphology and microstructure of the sensors are observed by SEM and AFM, its crystal structure is characterized by XRD, and its surface characteristic is analyzed by XPS. The results indicate that the "sandwiched" sensing layer shows higher response to ethanol compared with single-layer ZnO, and 15 (R-air/R-gas) was achieved as the best sensitivity to 100 ppm ethanol with the sensor consuming a low power consumption of just 12.17 mW
机译：本文提出了一种由微机电系统（MEMS）工艺完全制造的ZnO的气体传感器。气体传感器基于窄桥式微加热器，实现超低静态功耗。用物理气相沉积（PVD）溅射法在该加热器上沉积N型ZnO的传感材料。选择普通VOC气体作为待测气体的选择，并增强乙醇的性能，薄层金属添加剂Au在O-2的气氛中埋入两个ZnO膜层之间以形成“夹在“ZnO / Au / ZnO结构”。通过SEM和AFM观察传感器的形态和微观结构，其晶体结构的特征在于XRD，并且通过XPS分析其表面特性。结果表明，与单层ZnO相比，“夹心”感测层表明对乙醇的响应较高，并且将15个（R-AIR / R气）作为100ppm乙醇的最佳敏感性，传感器消耗低功率消耗仅12.17兆瓦

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  • 来源
    《IEEE sensors journal》 |2021年第17期|18578-18587|共10页
  • 作者

    Liu Ruichen; Xie Dongcheng; Adedokun George; Xue Feng; Xu Lei; Wu Feng;

  • 作者单位

    Univ Sci & Technol China Sch Microelect Hefei 230027 Peoples R China;

    Univ Sci & Technol China Sch Microelect Hefei 230027 Peoples R China;

    Univ Sci & Technol China Sch Microelect Hefei 230027 Peoples R China;

    Univ Sci & Technol China Sch Microelect Hefei 230027 Peoples R China;

    Univ Sci & Technol China Sch Microelect Hefei Natl Lab Phys Sci Microscale Hefei 230027 Peoples R China;

    Univ Sci & Technol China Sch Informat Sci & Technol Hefei 230027 Peoples R China;

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  • 原文格式 PDF
  • 正文语种 eng
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  • 关键词

    MEMS; zinc oxide; bridge-type micro-heater; gas sensor;

    机译：MEMS;氧化锌;桥式微加热器;气体传感器;

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