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Measurement of Deformation and Force for Microcantilevers Based on Feature Point Matching and Digital Image Correlation

机译：基于特征点匹配和数字图像相关的微悬臂梁变形和力测量

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摘要

The measurement of deformation and force for microcantilevers is an important issue in microassembly. An optical method based on local feature point matching and the digital image correlation (DIC) for deformation and force measurement of microcantilevers is proposed. Images of a microcantilever before and after deformation are obtained by an optical microscope. Using the Laplace-of-Gaussian (LOG) operator, feature points with local extreme response values are detected in the scale space in images before and after deformation. For each LOG feature point, an affine-invariant closed region is extracted based on which the sub-pixel position of the LOG point is relocated as the center of gravity of the closed region and an affine-invariant feature descriptor is constructed. Corresponding points in images before and after deformation are matched according to their affine invariant descriptors. To obtain the displacement of feature points with a higher resolution in bending deformation, the digital image correlation algorithm with a third-order transformation function is used and initialized by the sub-pixel information of matched points. The deformation of the microcantilever can be calculated by fitting the displacement of the matching points with the beam's bending deflection formula under the plane stress condition. Then, the force values as well as the position where the loader comes in contact with the cantilever are calculated through the least-squares method. The validity of the proposed method is verified through experiments on actual microcantilever deformation and comparison with other methods.
机译：微型悬臂的变形和力的测量是微型装配中的重要问题。提出了一种基于局部特征点匹配和数字图像相关（DIC）的微悬臂梁变形和力测量的光学方法。通过光学显微镜获得变形之前和之后的微悬臂梁的图像。使用高斯拉普拉斯（LOG）运算符，可以在变形前后在图像的比例空间中检测具有局部极端响应值的特征点。对于每个LOG特征点，提取仿射不变封闭区域，基于该仿射不变封闭区域，将LOG点的子像素位置重新定位为封闭区域的重心，并构造仿射不变特征描述符。图像变形前后的对应点根据其仿射不变描述符进行匹配。为了获得在弯曲变形中具有较高分辨率的特征点的位移，使用具有三阶变换函数的数字图像相关算法，并通过匹配点的子像素信息对其进行初始化。微悬臂梁的变形可以通过在平面应力条件下用梁的弯曲挠度公式拟合匹配点的位移来计算。然后，通过最小二乘法计算力值以及装载机与悬臂接触的位置。通过实际的微悬臂梁变形实验以及与其他方法的比较，验证了该方法的有效性。

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