Absolute diffraction efficiency of laminar-type diffraction gratings used for spectrometers in the soft X-ray region was examined. Two types of diffraction gratings were produced : one has a groove density of 2400 grooves/mm and the other 3600 grooves/mm. The absolute diffraction efficiency of the two gratings was measured in the wavelength range from 0.6 nm to 6nm at the Synchrotron Radiation Center of Ritsumeikan University. Furthermore, the actual measurement values and the calculated values by use of some kinds of diffraction efficiency calculation software were compared in terms of absolute diffraction efficiency. The present paper describes the examination. Also discussed is the method for manufacturing laminar-type holographic diffraction gratings.%軟Ⅹ線領域用分光器に使用されるラミナー型回折格子の絶対回折効率に関して検討を行った。溝本数2400本 /mmと3600本/mmのラミナー型ホログラフィツク回折格子を製作し,立命館大学SRセンターにおいて波長 0.6~6nmでの絶対回折効率を実測した。また,これらの回折格子に関して,各種回折効率計算ソフトにより シミュレーションを行い,実測値との比較を行った。本稿ではこれらの測定結果と計算結果について報告する。
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