The present paper discusses the fabrication of micro-fluidic devices, describing some of the devices for which glass materials, including silica substrate, are used. One example of the micro-fluidic devices is a silica electrophoresis microchip used for our MCE-2010 microchip electrophoresis system. Another example is a glass plate incorporated in our newly developed DNA sequencer named DeNOVA-5000HT. Also outlined is a device for culture and function test of liver tissue, which is currently under development in conjunction with Tokyo Insitute of Technology.%微小流体デバイスの作製工程について解説し，石英基板を含むガラス系素材を用いた微小流体デバイスの製 品例を紹介する。あわせて，国立大学法人東京工業大学の田川准教授らと共同で開発中の肝組織用デバイス についても言及する。
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