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Post-Si Programmable ESD Protection Circuit Design: Mechanisms and Analysis

机译:Si后可编程ESD保护电路设计:机理与分析

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摘要

This paper reports new mechanisms, design, and analysis of novel electrostatic discharge (ESD) protection solutions, which enable post-Si field-programmable ESD protection circuit design for the first time. Two new ESD protection concepts, nano-crystal quantum-dot (NC-QD) and silicon–oxide–nitride–oxide–silicon (SONOS)-based ESD protection, are presented. Experiments validated the two new programmable ESD protection mechanisms. Prototype designs demonstrated a wide adjustable ESD triggering voltage $({V}_{{t}1})$ range of $Delta{V}_{{t}1}sim hbox{ 2 V}$, very fast response $({t}_{1})$ to ESD transients of rising time ${t}_{r}sim hbox{ 100 pS}$ and pulse duration ${t}_{d}sim hbox{ 1 nS}$, ESD protection capability $({I}_{{t}2})$ of at least 25 $hbox{mA}/muhbox{m}$ for human body model (HBM) and 400 $hbox{mA}/muhbox{m}$ for charged device model (CDM) equivalent stressing, and very low leakage current $({I}_{rm leak})$ as low as 1.2 pA. Field-programmable ESD protection circuit design examples are discussed.
机译:本文报告了新颖的静电放电(ESD)保护解决方案的新机制,设计和分析,这些解决方案首次实现了硅后场可编程ESD保护电路的设计。提出了两种新的ESD保护概念,即基于纳米晶体量子点(NC-QD)和基于氧化硅-氮化物-氧化硅-SONOS的ESD保护。实验验证了两种新的可编程ESD保护机制。原型设计展示了可调节的ESD触发电压$({V} _ {{t} 1})$范围$ Delta {V} _ {{t} 1} sim hbox {2 V} $,响应速度非常快( {t} _ {1})$到ESD瞬变时间$ {t} _ {r} sim hbox {100 pS} $和脉冲持续时间$ {t} _ {d} sim hbox {1 nS} $人体模型(HBM)的保护能力$({I} _ {{t} 2})$至少25 $ hbox {mA} / muhbox {m} $和400 $ hbox {mA} / muhbox {m} $表示带电设备模型(CDM)的等效应力,并且漏电流极低($ {I} _ {rm泄漏})$低至1.2 pA。讨论了现场可编程ESD保护电路的设计实例。

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