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首页> 外文期刊>IEEE Journal of Solid-State Circuits >A 1/2-in, 1.3 M-pixel progressive-scan CCD image sensor employing0.25-Μm gap single-layer poly-Si electrodes
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A 1/2-in, 1.3 M-pixel progressive-scan CCD image sensor employing0.25-Μm gap single-layer poly-Si electrodes

机译:采用0.25μm间隙的单层多晶硅电极的1/2英寸,1.3 M像素逐行扫描CCD图像传感器

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摘要

A 1/2-in, 1.3 M-pixel progressive-scan interline-transfer chargencoupled-device (IT-CCD) image sensor has been developed for low-powernand high-sensitivity digital cameras. The image sensor uses 0.25-Μmngap single-layer poly-Si for CCD transfer electrodes in order to reducenthe power consumption and number of fabrication process steps. The imagensensor achieved a low driving voltage (2.1 V) on a horizontal CCDn(H-CCD) at a frequency of 24.5 MHz. An original pixel layout and anself-aligned photodiode structure make it possible to achieve anprogressive scan pixel with well-controlled photodiode readoutncharacteristics. An output three-stage source follower amplifier withnnew multioxide transistors, whose gate insulator thickness is thinnernthan that of a CCD register, is able to attain 17% higher gain than thatnof the conventional amplifier. The sensor provides low-power (100 mW)nand high output sensitivity. The total number of steps for fabricatingnthe sensor was reduced to 70% of that for conventional three-layernpoly-Si electrodes
机译:已为低功率和高灵敏度数码相机开发了1/2英寸,1.3 M像素逐行扫描线间传输电荷耦合器件(IT-CCD)图像传感器。图像传感器使用0.25 Mmngap单层多晶硅作为CCD传输电极,以减少功耗和制造工艺步骤。图像传感器在水平CCDn(H-CCD)上以24.5 MHz的频率实现了低驱动电压(2.1 V)。原始的像素布局和自对准的光电二极管结构可以实现具有良好控制的光电二极管读出特性的逐行扫描像素。具有新型多氧化物晶体管的输出三级源极跟随器放大器,其栅极绝缘体的厚度比CCD寄存器的厚度薄,其增益比传统放大器高17%。该传感器提供低功率(100 mW)n和高输出灵敏度。传感器的制造步骤总数减少到传统三层多晶硅电极的70%

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