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首页> 外文期刊>IEEE Journal of Solid-State Circuits >A 2D CMOS microfluxgate sensor system for digital detection of weak magnetic fields
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A 2D CMOS microfluxgate sensor system for digital detection of weak magnetic fields

机译:用于弱磁场数字检测的2D CMOS microfluxgate传感器系统

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摘要

This paper presents a CMOS two-dimensional (2-D) vector magnetic sensor system integrating two planar microfluxgate sensors and the complete electronics for sensor excitation and signal readout. The system is based on an industrial 0.8-/spl mu/m double-poly, double-metal CMOS technology with ferromagnetic NiFeMo cores added in a simple postprocessing sequence. The fluxgate sensors are embedded in a /spl Sigma//spl Delta/ analog-to-digital converter for a stable and precise digital detection of weak magnetic fields. A cascaded /spl Sigma//spl Delta/ modulator topology is utilized to obtain second-order noise shaping and to suppress pattern noise. Within the range of /spl plusmn/50 /spl mu/T, the system nonlinearity is less than 1.5 /spl mu/T. The angular resolution as a 2D vector sensor is less than 4/spl deg/ for a measured magnetic induction of 50 /spl mu/T. This makes the 2-D microfluxgate magnetometer suitable for use as fully integrated electronic compass.
机译:本文介绍了一个CMOS二维(2-D)矢量磁传感器系统,该系统集成了两个平面微通量门传感器以及用于传感器激励和信号读出的完整电子设备。该系统基于工业0.8- / splμm/ m双多晶硅双金属CMOS技术,并以简单的后处理顺序添加了铁磁NiFeMo磁芯。磁通门传感器嵌入在/ spl Sigma // spl Delta /模数转换器中,可对弱磁场进行稳定而精确的数字检测。级联的/ spl Sigma // spl Delta /调制器拓扑用于获得二阶噪声整形并抑制模式噪声。在/ spl plusmn / 50 / spl mu / T的范围内,系统非线性度小于1.5 / spl mu / T。作为二维矢量传感器的角分辨率小于4 / spl deg /,对于50 / spl mu / T的测量磁感应强度。这使得二维微通量门磁力计适合用作完全集成的电子罗盘。

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