A 2D CMOS microfluxgate sensor system for digital detection of weakmagnetic fields

Kawahito S.; Maier C.; Schneiher M.; Zimmermann M.; Baltes H.

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A 2D CMOS microfluxgate sensor system for digital detection of weakmagnetic fields

机译：用于弱磁场数字检测的2D CMOS microfluxgate传感器系统

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This paper presents a CMOS two-dimensional (2-D) vector magneticnsensor system integrating two planar microfluxgate sensors and thencomplete electronics for sensor excitation and signal readout. Thensystem is based on an industrial 0.8-Μm double-poly, double-metalnCMOS technology with ferromagnetic NiFeMo cores added in a simplenpostprocessing sequence. The fluxgate sensors are embedded in anΣΔ analog-to-digital converter for a stable and precisendigital detection of weak magnetic fields. A cascaded ΣΔnmodulator topology is utilized to obtain second-order noise shaping andnto suppress pattern noise. Within the range of ±50 ΜT, thensystem nonlinearity is less than 1.5 ΜT. The angular resolution as an2D vector sensor is less than 4° for a measured magnetic inductionnof 50 ΜT. This makes the 2-D microfluxgate magnetometer suitable fornuse as fully integrated electronic compass

机译：本文提出了一个CMOS二维（2-D）矢量磁传感器系统，该系统集成了两个平面微通量门传感器，然后是用于传感器激励和信号读出的完整电子设备。然后，系统基于工业化的0.8μm双晶双金属CMOS技术，并以简单的后处理顺序添加了铁磁NiFeMo磁芯。磁通门传感器嵌入在ΣΔ模数转换器中，用于稳定，精确地检测弱磁场。级联的ΣΔn调制器拓扑用于获得二阶噪声整形并抑制模式噪声。在±50 MT的范围内，则系统非线性小于1.5 MT。对于50 MT的磁感应强度，作为2D矢量传感器的角分辨率小于4°。这使二维微通量门磁力计适合用作完全集成的电子罗盘

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来源
《IEEE Journal of Solid-State Circuits》 |1999年第12期|p.1843-1851|共9页
作者
Kawahito S.; Maier C.; Schneiher M.; Zimmermann M.; Baltes H.;
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收录信息美国《科学引文索引》(SCI);美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
中图分类一般性问题;基本电子电路;
关键词
CMOS integrated circuits; fluxgate magnetometers; magnetic cores; magnetic sensors; microsensors; sigma-delta modulation; 0.8 micron; 2D CMOS microfluxgate sensor system; 50 muT; NiFeMo; analog-to-digital converter; angular resolution; digital detection; double-poly;

机译：CMOS集成电路;磁通门磁力计;磁芯;磁性传感器;微传感器;Σ-Δ调制;0.8微米;2D CMOS微磁通门传感器系统;50 muT;NiFeMo;模数转换器;角度分辨率;数字检测;双聚;

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专利

1. A 2D CMOS microfluxgate sensor system for digital detection of weak magnetic fields [J] . Kawahito S., Maier C. IEEE Journal of Solid-State Circuits . 1999,第12期

机译：用于弱磁场数字检测的2D CMOS microfluxgate传感器系统
2. Multi-dimensional detection of magnetic fields using CMOS integrated sensors [J] . Paranjape M., Ristic L. IEEE Transactions on Magnetics . 1991,第6期

机译：使用CMOS集成传感器对磁场进行多维检测
3. Detection of cavitated or non-cavitated approximal enamel caries lesions using CMOS and CCD digital X-ray sensors and conventional D and F-speed films at different exposure conditions. [J] . Bottenberg P, Jacquet W, Stachniss V, American journal of dentistry . 2011,第2期

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4. A CMOS 2D Micro-Fluxgate Earth Magnetic Field Sensor with Digital Output [C] . Baschirotto, A., Dallago, . 2007

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6. A Highly Sensitive CMOS Digital Hall Sensor for Low Magnetic Field Applications [O] . Yue Xu, Hong-Bin Pan, Shu-Zhuan He, 2012

机译：适用于低磁场应用的高灵敏度CMOS数字霍尔传感器
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A 2D CMOS microfluxgate sensor system for digital detection of weakmagnetic fields

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