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A manufacturable process integration approach for graphene devices

机译:石墨烯器件的可制造工艺集成方法

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摘要

In this work, we propose an integration approach for double gate graphene field effect transistors. The approach includes a number of process steps that are key for future integration of graphene in microelectronics: bottom gates with ultra-thin (2 nm) high-quality thermally grown SiO_2 dielectrics, shallow trench isolation between devices and atomic layer deposited Al_2O_3 top gate dielectrics. The complete process flow is demonstrated with fully functional GFET transistors and can be extended to wafer scale processing. We assess, through simulation, the effects of the quantum capacitance and band bending in the silicon substrate on the effective electric fields in the top and bottom gate oxide. The proposed process technology is suitable for other graphene-based devices such as graphene-based hot electron transistors and photodetectors.
机译:在这项工作中,我们提出了一种用于双栅极石墨烯场效应晶体管的集成方法。该方法包括许多工艺步骤,这些步骤对于将来石墨烯在微电子学中的集成至关重要:具有超薄(2 nm)高质量热生长SiO_2电介质的底栅,器件之间的浅沟槽隔离以及原子层沉积的Al_2O_3顶栅电介质。完整功能的GFET晶体管演示了完整的工艺流程,并且可以扩展到晶圆级工艺。通过仿真,我们评估了硅基板中的量子电容和能带弯曲对顶部和底部栅极氧化物中有效电场的影响。所提出的工艺技术适用于其他基于石墨烯的器件,例如基于石墨烯的热电子晶体管和光电探测器。

著录项

  • 来源
    《Solid-State Electronics》 |2013年第6期|185-190|共6页
  • 作者单位

    KTH Royal Institute of Technology, School of Information and Communication Technology, Isafjordsgatan 22, 16440 Kista, Sweden;

    IHP, Im Technologiepark 25, 15236 Frankfurt (Oder), Germany;

    DIEGM, University of Udine, Via delle Scienze 206, 33100 Udine, Italy;

    KTH Royal Institute of Technology, School of Information and Communication Technology, Isafjordsgatan 22, 16440 Kista, Sweden;

    KTH Royal Institute of Technology, School of Information and Communication Technology, Isafjordsgatan 22, 16440 Kista, Sweden;

    IHP, Im Technologiepark 25, 15236 Frankfurt (Oder), Germany;

    IHP, Im Technologiepark 25, 15236 Frankfurt (Oder), Germany;

    IHP, Im Technologiepark 25, 15236 Frankfurt (Oder), Germany;

    KTH Royal Institute of Technology, School of Information and Communication Technology, Isafjordsgatan 22, 16440 Kista, Sweden;

    KTH Royal Institute of Technology, School of Information and Communication Technology, Isafjordsgatan 22, 16440 Kista, Sweden ,University of Siegen, Hoelderlinstr. 3, 57076 Siegen, Germany;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Graphene; Transistors; Process integration; Hot electrons; Quantum capacitance; Dielectric breakdown;

    机译:石墨烯晶体管;流程整合;热电子;量子电容介电击穿;

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