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首页> 外文期刊>Solid-State Electronics >Thermal-stability performance of a metamorphic high electron mobility transistor (MHEMT) with non-annealed Ohmic contacts
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Thermal-stability performance of a metamorphic high electron mobility transistor (MHEMT) with non-annealed Ohmic contacts

机译:具有非退火欧姆接触的变质高电子迁移率晶体管(MHEMT)的热稳定性能

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摘要

The temperature-dependent characteristics of the non-annealed Ohmic contacts InAlAs/lnGaAs MHEMT are studied and demonstrated. Due to the use of Ohmic-recess technique, the improvements on device performance including higher saturation drain current, higher transconductance, lower on-resistance, lower parasitic resistance, more linear operating regime, and superior microwave performance are obtained. The non-annealed Ohmic contacts device also shows good properties at higher operating temperature regime and the relatively thermal stable performance over the operating temperature range (300-500 K). Therefore, the studied device with non-annealed Ohmic contacts process provides the promise for high-temperature and high-performance microwave electronic device applications.
机译:研究并证明了非退火欧姆接触InAlAs / InGaAs MHEMT的温度相关特性。由于使用了欧姆凹陷技术,器件性能得到了改善,包括更高的饱和漏极电流,更高的跨导,更低的导通电阻,更低的寄生电阻,更线性的工作方式以及更出色的微波性能。非退火欧姆接触器件在较高的工作温度范围内也显示出良好的性能,并且在工作温度范围(300-500 K)内具有相对热稳定的性能。因此,所研究的具有非退火欧姆接触工艺的器件为高温和高性能微波电子器件的应用提供了希望。

著录项

  • 来源
    《Solid-State Electronics》 |2010年第3期|279-282|共4页
  • 作者单位

    Institute of Microelectronics, Department of Electrical Engineering, National Cheng-Kung University, 1 University Road, Tainan 70101, Taiwan, ROC;

    Department of Electronic Engineering, National Ilan University, No. 1, Sec. 1, Shen-Lung Road, I-Lan 26041, Taiwan, ROC;

    Institute of Microelectronics, Department of Electrical Engineering, National Cheng-Kung University, 1 University Road, Tainan 70101, Taiwan, ROC;

    Institute of Microelectronics, Department of Electrical Engineering, National Cheng-Kung University, 1 University Road, Tainan 70101, Taiwan, ROC;

    Institute of Microelectronics, Department of Electrical Engineering, National Cheng-Kung University, 1 University Road, Tainan 70101, Taiwan, ROC;

    Institute of Microelectronics, Department of Electrical Engineering, National Cheng-Kung University, 1 University Road, Tainan 70101, Taiwan, ROC;

    Institute of Microelectronics, Department of Electrical Engineering, National Cheng-Kung University, 1 University Road, Tainan 70101, Taiwan, ROC;

    Institute of Microelectronics, Department of Electrical Engineering, National Cheng-Kung University, 1 University Road, Tainan 70101, Taiwan, ROC;

    Institute of Microelectronics, Department of Electrical Engineering, National Cheng-Kung University, 1 University Road, Tainan 70101, Taiwan, ROC;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    ohmic-recess (OR); non-annealed (NA);

    机译:欧姆凹(OR);非退火(NA);

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