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首页> 外文期刊>Thin Solid Films >Effect of thermal treatment on structure, phase and mechanical properties of hydroxyapatite thin films grown by RF magnetron sputtering
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Effect of thermal treatment on structure, phase and mechanical properties of hydroxyapatite thin films grown by RF magnetron sputtering

机译：热处理对射频磁控溅射制备羟基磷灰石薄膜的结构，相和力学性能的影响

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摘要

Hydroxyapatite (HA) thin films with a Ca/P ratio of 1.69 and approximately 500 nm in thickness were deposited by radio frequency magnetron sputtering on Ti-6Al-4 V substrates at 100 degrees C and a working pressure of 0.5 Pa. The obtained coatings were thermally treated at 400 and 700 degrees C in argon atmosphere and characterized in terms of elemental and phase composition, morphology, structure and mechanical properties by energy dispersive x-ray spectroscopy, scanning electron microscopy, atomic force microscopy, micro-Raman spectroscopy, Fourier transform infrared spectroscopy, X-ray diffraction and nanoindentation. It was found that the thermal treatments increase the crystallinity although induce residual tensile stresses formation in the HA coatings, which are greater at high temperatures. Nevertheless, enhances in the mechanical properties: hardness (H), elastic modulus (E) and adhesion strength for the heat treated at 400 degrees C samples compared to the as-deposited coatings were obtained. Values of 7.45 +/- 0.6 GPa (H), 115 +/- 10 GPa (E) and a critical load of 175 +/- 4 mN were measured for those thermally treated samples at 400 degrees C.
机译：Ca / P比为1.69且厚度约为500 nm的羟基磷灰石（HA）薄膜通过射频磁控溅射在100摄氏度和0.5 Pa的工作压力下沉积在Ti-6Al-4 V基板上。获得的涂层在氩气中于400和700摄氏度下进行了热处理，并通过能量色散X射线光谱，扫描电子显微镜，原子力显微镜，显微拉曼光谱，傅里叶表征了元素和相组成，形态，结构和力学性能变换红外光谱，X射线衍射和纳米压痕。已经发现，尽管在HA涂层中引起残余张应力的形成，但是热处理增加了结晶度，该残余张应力在高温下更大。然而，与沉积的涂层相比，机械性能得到了提高：在400摄氏度的样品中进行热处理的硬度（H），弹性模量（E）和附着强度得到了提高。在400摄氏度下对这些热处理过的样品测得的值分别为7.45 +/- 0.6 GPa（H），115 +/- 10 GPa（E）和175 +/- 4 mN临界载荷。

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