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首页> 外文期刊>Thin Solid Films >Microstructural differences between two Zr(C,N) coatings revealed by analytical transmission electron microscopy
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Microstructural differences between two Zr(C,N) coatings revealed by analytical transmission electron microscopy

机译：分析型透射电子显微镜揭示两种Zr（C，N）涂层之间的微观结构差异

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摘要

The microstructures of two samples of a Zr(CN) coating on steel, which unexpectedly differed in their tribological properties, were investigated by analytical transmission electron microscopy. The samples were produced by a cathodic arc evaporation process in two commercial coating devices under similar coating conditions with the exception of the number of Zr targets.The source of the differing tribological properties of the samples was detected by analytical transmission electron microscopy (TEM) methods energy-dispersive X-ray spectroscopy (EDX), energy filtering TEM (EFTEM), electron diffraction, high resolution electron microscopy, and high angel annular dark field. The TEM preparation and the results of the TEM investigations are shown in detail. The origin of the unexpected behavior was determined to be a nano-scale multilayer structure that existed only in the tribologically superior specimen. EDX and EFTEM investigations indicated enrichment in oxygen at the interface between coating and steel substrate in the tribologically inferior sample. Findings of the microstructural configuration were obtained by taking a closer look at the structure and comparing the results of the several analytical TEM techniques. This allows the allocation of the concentration fluctuations in N, C, and Zr to the two thickness fractions of the nano multilayers and a local correlation of the identified minority phase Zr_3(C,N)_4 to the higher N content in the narrower type of the multilayer fraction of the sample with the excellent tribological properties. The minority phase Zr_3(C,N)_4 is randomly distributed in the sample with the defective tribological properties.Coating conditions are not topic of this work, but after discussion of the TEM results, the fact that one of the coating devices worked with one Zr target and the other one with two, could be identified as cause for the formation of the nano multilayer structure in the sample with the superior tribological properties.
机译：通过分析透射电子显微镜研究了钢上Zr（CN）涂层的两个样品的微观结构，这些样品的摩擦学性能出乎意料的不同。样品是通过阴极电弧蒸发工艺在两个商用镀膜设备中在相似的镀膜条件下生产的，除了Zr靶的数量不同之外。样品的不同摩擦学性质的来源通过分析透射电子显微镜（TEM）方法进行检测能量色散X射线光谱（EDX），能量过滤TEM（EFTEM），电子衍射，高分辨率电子显微镜和高天使环形暗场。详细显示了TEM制备和TEM研究的结果。意外行为的起因被确定为仅存在于摩擦学上优越的标本中的纳米级多层结构。 EDX和EFTEM研究表明，在摩擦学较差的样品中，涂层与钢基材之间的界面处富氧。通过仔细观察结构并比较几种分析TEM技术的结果，可以获得微观结构的发现。这允许将N，C和Zr中的浓度波动分配给纳米多层的两个厚度部分，并且将较窄类型的Zr_3（C，N）_4的识别出的少数相Zr_3（C，N）_4与较高的N含量进行局部关联。具有优异摩擦学性能的样品的多层级分。少数相Zr_3（C，N）_4随机分布在具有摩擦学特性缺陷的样品中。镀膜条件不是这项工作的主题，但是在讨论TEM结果后，事实证明其中一个镀膜装置可以与一个Zr靶标和另一个具有两个靶标的靶标可被确定为在具有优异摩擦学特性的样品中形成纳米多层结构的原因。

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