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Influence of spray pyrolysis deposition parameters on the optoelectronic properties of WO_3 thin films

机译：喷雾热解沉积参数对WO_3薄膜光电性能的影响

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摘要

The electrochromic (EC) properties of tungsten oxide (WO_3), such as coloration efficiency, cyclic durability and reversibility strongly depend on the structural and morphological properties, which are influenced by the deposition method and parameters.This paper presents the steps for optimizing the deposition parameters (substrate temperature, air flow pressure and precursor solution molarity) for improving the optical and electrical properties of WO_3 thin films for EC applications. WO_3 thin films were deposited by spray pyrolysis using tungsten hexachloride (WCl_6 dissolved in ethanol as precursor solution. The EC properties of optimized films were tested in two different electrolytes (H_2SO_4 1 M and acetic acid/sodium acetate buffer with pH = 4) and changes in structure, composition and morphology of the films after coloration/bleaching cycles were discussed.The deposition temperature, carrier gas pressure and solution molarity were optimized at 250 ℃, 120 kPa and 0.14 M respectively. Under these condition a dense, uniform film, with homogenous distribution of particles, good adhesion to the substrate, low roughness (9.02 nm), high transparency (>70% in the 500-1100 nm range) and conductivity was obtained. Transmission modulation is higher for the sample cycled in H_2SO_4 1 M (64% at 630 nm) compared to that cycled in the buffer (21 % at 630 nm), whereas opposite results were obtained for coloration efficiencies 28 cm~2 C~(-1) (at 630 nm) and 35 cm~2 C~(-1) (at 630 nm), respectively. Changes in surface chemistry and morphology of the optimized sample were observed after cycling in H_2SO_4.
机译：氧化钨（WO_3）的电致变色（EC）特性（例如着色效率，循环耐久性和可逆性）在很大程度上取决于结构和形态特性，这些特性受沉积方法和参数的影响。本文介绍了优化沉积的步骤用于改善EC应用WO_3薄膜的光学和电学性能的参数（基板温度，气流压力和前体溶液摩尔浓度）。用六氯化钨（WCl_6溶于乙醇作为前体溶液）通过喷雾热解沉积WO_3薄膜，在两种不同的电解质（H_2SO_4 1 M和pH = 4的乙酸/乙酸钠缓冲液）中测试了优化的薄膜的EC性能。在250℃，120 kPa和0.14 M的条件下优化了沉积温度，载气压力和溶液的摩尔浓度，在此条件下形成了致密，均匀的薄膜。获得了均匀的颗粒分布，对基材的良好附着力，较低的粗糙度（9.02 nm），较高的透明度（在500-1100 nm范围内> 70％）和电导率。在H_2SO_4 1 M（ 630 nm时为64％），而在缓冲液中循环时为630nm（21％），而在28 cm〜2 C〜（-1）（630 nm）和35 cm〜2 C的显色效率获得了相反的结果〜（-1）（在630 nm处）。在H_2SO_4中循环后，观察到优化样品的表面化学和形态变化。

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  • 来源
    《Thin Solid Films》 |2012年第13期|p.4282-4290|共9页
  • 作者

    L.M. Bertus; A. Enesca; A. Duta;

  • 作者单位

    The RTD Dept. Renewable Energy Systems and Recycling, Transilvania University of Brasov, Eroilor 29,500036 Brasov, Romania;

    The RTD Dept. Renewable Energy Systems and Recycling, Transilvania University of Brasov, Eroilor 29,500036 Brasov, Romania;

    The RTD Dept. Renewable Energy Systems and Recycling, Transilvania University of Brasov, Eroilor 29,500036 Brasov, Romania;

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  • 正文语种 eng
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  • 关键词

    tungsten oxide; thin films; electrochromic properties; spray pyrolysis; optical properties; microstructure;

    机译：氧化钨薄膜;电致变色性能;喷雾热解光学性质微观结构;

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