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首页> 外文期刊>Thin Solid Films >Nanoporous cluster-assembled WO_x films prepared by radio-frequency assisted laser ablation
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Nanoporous cluster-assembled WO_x films prepared by radio-frequency assisted laser ablation

机译：射频辅助激光烧蚀制备纳米孔团簇组装WO_x薄膜

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摘要

The influence of substrate temperature and ambient gas pressure-composition on the characteristics of WO_x films synthesized by radio-frequency assisted pulsed laser deposition (RF-PLD) are studied with the aim to obtain nanostructured films with large surface area that appear promising for gas sensing applications. A tungsten target was ablated both in chemically reactive molecular oxygen at 5 Pa and in a mixed oxygen-helium atmosphere at 700 Pa. Corning glass was used as the substrate, at 473, 673 and 873 K. Other deposition parameters such as laser fluence (4.5 J/cm~2), laser wavelength (355 nm), radio-frequency power (150W), and target to substrate distance (4 cm) were kept fixed. The sensitivity on the deposition parameters of roughness, morphology, nanostructure and bond coordination of the deposited films were analysed by atomic force microscopy, scanning electron microscopy, transmission electron microscopy and micro-Raman spectroscopy. The role of the investigated process parameters to nanoparticle formation and to the development of an extended nanostructure is discussed.
机译：研究了衬底温度和环境气压成分对射频辅助脉冲激光沉积（RF-PLD）合成的WO_x薄膜特性的影响，旨在获得大表面积的纳米结构薄膜，这些薄膜对气体传感具有广阔的前景应用程序。在5 Pa的化学反应性分子氧和700 Pa的混合氧氦气氛中均烧蚀了钨靶。康宁玻璃被用作衬底，温度分别为473、673和873K。其他沉积参数，例如激光能量密度（激光波长（355 nm），射频功率（150W）和靶到基板的距离（4 cm）保持固定（4.5 J / cm〜2）。通过原子力显微镜，扫描电子显微镜，透射电子显微镜和显微拉曼光谱分析了沉积膜的粗糙度，形貌，纳米结构和键配位对沉积参数的敏感性。讨论了所研究的工艺参数对纳米颗粒形成和扩展纳米结构发展的作用。

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  • 来源
    《Thin Solid Films》 |2010年第16期|P.4493-4498|共6页
  • 作者

    M. Dinescu; rnM. Filipescu; rnP.M. Ossi; rnN. Santo;

  • 作者单位

    National Institute for Laser, Plasma and Radiation Physics, P.O. Box MG 16, RO- 77125 Magurele, Bucharest, Romania;

    rnNational Institute for Laser, Plasma and Radiation Physics, P.O. Box MG 16, RO- 77125 Magurele, Bucharest, Romania;

    rnDipartimento di Energia & Centre for NanoEngineered Materials and Surfaces - NEMAS, Politecnico di Milano, Italy;

    rnCIMA, Universita degli Studi, Milano, Italy;

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  • 正文语种 eng
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  • 关键词

    pulsed laser deposition; radio-frequency; nanoparticle; cluster-assembled;

    机译：脉冲激光沉积无线电频率;纳米粒子集群组装;

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