Low Temperature Growth Of Manganese Cobalt Nickelate Films By Chemical Deposition

Yujian Ge; Zhiming Huang; Yun Hou; Jianhuan Qin; Tianxin Li; Junhao Chu

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Low Temperature Growth Of Manganese Cobalt Nickelate Films By Chemical Deposition

机译：化学沉积法低温生长锰酸镍钴薄膜

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Manganese cobalt nickelate films (Mn_xCo_yNi_(3-x-y))O_4 (MCN) were prepared by chemical deposition method at a crystallization temperature of 600 ℃, which is lower than the usual sintering temperature of ～1050-1200 ℃. The grain size of the MCN films increased from 20 to 60 nm with the annealing temperature increased from 600 ℃ to 900 ℃. The secondary ion mass spectroscopy (SIMS) shows that elements of Mn, Co, Ni in the films were distributed homogenuously and that the diffusion of Si at the interface was negligeable. The infrared optical constants of the MCN thin films were determined using infrared spectroscopic ellipsometry.

机译：采用化学沉积法在600℃的结晶温度下制备了镍钴酸锰薄膜（Mn_xCo_yNi_（3-x-y））O_4（MCN），该温度低于通常的〜1050-1200℃的烧结温度。随着退火温度从600℃增加到900℃，MCN薄膜的晶粒尺寸从20 nm增加到60 nm。二次离子质谱（SIMS）表明，薄膜中的Mn，Co，Ni元素分布均匀，界面处Si的扩散可忽略不计。 MCN薄膜的红外光学常数使用红外光谱椭偏法测定。

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来源
《Thin Solid Films》 |2008年第18期|p.5931-5934|共4页
作者
Yujian Ge; Zhiming Huang; Yun Hou; Jianhuan Qin; Tianxin Li; Junhao Chu;
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作者单位

National Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, 500 Yu Tian Road, Shanghai, 200083, People's Republic of China;

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原文格式 PDF
正文语种 eng
中图分类工程材料学;
关键词
manganese cobalt nickelate film; x-ray diffraction; atomic force microscopy; infrared spectroscopic ellipsometry;

机译：锰酸镍钴薄膜;X射线衍射;原子力显微镜;红外光谱椭偏;

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2. Growth of crystalline cobalt ferrite thin films at lower temperatures using pulsed-laser deposition technique [J] . A. Raghunathan, I. C. Nlebedim, D. C. Jiles, Journal of Applied Physics . 2010,第9pta2期

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4. Crystallization of manganese cobalt nickelate films prepared by chemical deposition [C] . Yujian Ge, Zhiming Huang, Yun Hou, International Conference on Thin Film Physics and Applications . 2008

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Low Temperature Growth Of Manganese Cobalt Nickelate Films By Chemical Deposition

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