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首页> 外文期刊>Thin Solid Films >Combinatorial Synthesis And Characterization Of Magnetic Fe_xal_(1-x)n_yo_(1-y) Thin Films
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Combinatorial Synthesis And Characterization Of Magnetic Fe_xal_(1-x)n_yo_(1-y) Thin Films

机译：Fe_xal_（1-x）n_yo_（1-y）磁性薄膜的组合合成与表征

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摘要

The electromagnetic behavior of nanoscale layered and particulate structures of Fe_xAl_(1-x)N_yO_(1-y) materials have potential applications in medical device technologies. Iron and aluminum have been co-sputtered in an Ar-N_2 ambient to form a combinatorial array of Fe_xAl_(1-x)N_yO_(1-y) thin films. Using this approach, we are able to achieve an Fe/(Fe+Al) cation range from ～ 12-60% over a 10 cm long substrate. The deposited films were annealed in vacuum at various temperatures and the films have been characterized by X-ray photoelectron spectroscopy, energy dispersive X-ray spectroscopy, scanning electron microscopy, scanning transmission electron microscopy, and X-ray diffraction. Furthermore, the direct current magnetic properties of the films have been characterized. In this paper, we describe in detail the reactive combinatorial Fe_xAl_(1-x)N_yO_(1-y)sputtering approach. The chemical, structural, and morphological properties as a function of Fe/(Fe+Al) content are demonstrated and correlated to the measured dc magnetic properties.
机译：Fe_xAl_（1-x）N_yO_（1-y）材料的纳米层状和颗粒结构的电磁行为在医疗设备技术中具有潜在的应用。铁和铝已在Ar-N_2环境中共同溅射，以形成Fe_xAl_（1-x）N_yO_（1-y）薄膜的组合阵列。使用这种方法，我们能够在10 cm长的基底上达到〜12-60％的Fe /（Fe + Al）阳离子范围。所沉积的膜在各种温度下在真空中退火，并且已通过X射线光电子能谱，能量色散X射线能谱，扫描电子显微镜，扫描透射电子显微镜和X射线衍射对膜进行了表征。此外，已经表征了膜的直流磁性能。在本文中，我们详细描述了反应性组合Fe_xAl_（1-x）N_yO_（1-y）溅射方法。证明了作为Fe /（Fe + Al）含量的函数的化学，结构和形态特性，并将其与测得的直流磁性能相关。

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