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首页> 外文期刊>Thin Solid Films >Preparation of La_(0.7)Sr_(0.3)MnO_3/LaNiO_3 magnetic oxide superlattice structure by rf sputtering
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Preparation of La_(0.7)Sr_(0.3)MnO_3/LaNiO_3 magnetic oxide superlattice structure by rf sputtering

机译：射频溅射制备La_（0.7）Sr_（0.3）MnO_3 / LaNiO_3磁性氧化物超晶格结构

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摘要

Artificial superlattice structures consisting of perovskite ferromagnetic oxide La_(0.7)Sr_(0.3)MnO_3 (LSMO) and paramagnetic oxide LaNiO_3 (LNO) sublayers have been grown on a SrTiO_3 substrate with rf magnetron sputtering. Measurements of X-ray reflectivity and grazing incidence X-ray diffraction were employed to characterize the microstructure of these films. An azimuthal scan around the surface Bragg peak of the film demonstrates that an epitaxial relationship between a film and a substrate can be achieved through sputtering. A clearly discernible main peak and satellite peaks on both sides of the main peak indicate the high quality of the LSMO/LNO artificial superlattice structure formed on a SrTiO_3 substrate. The higher the deposition temperature is, the larger is the in-plane lattice strain of the films present; the larger the saturation magnetization is, the smaller is the magnetic coercivity field.
机译：由钙钛矿铁磁氧化物La_（0.7）Sr_（0.3）MnO_3（LSMO）和顺磁氧化物LaNiO_3（LNO）子层组成的人工超晶格结构已通过射频磁控溅射在SrTiO_3衬底上生长。 X射线反射率和掠入射X射线衍射的测量用于表征这些膜的微观结构。围绕膜的表面布拉格峰的方位角扫描表明，可以通过溅射来实现膜与基板之间的外延关系。主峰两侧清晰可见的主峰和卫星峰表明在SrTiO_3衬底上形成的LSMO / LNO人工超晶格结构的高质量。沉积温度越高，存在的薄膜的面内晶格应变越大；饱和磁化强度越大，矫顽磁力场就越小。

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