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首页> 外文期刊>Thin Solid Films >Preparation of silver thin films using liquid-phase precursors by metal organic chemical vapor deposition and their conversion to silver selenide films by selenium vapor deposition
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Preparation of silver thin films using liquid-phase precursors by metal organic chemical vapor deposition and their conversion to silver selenide films by selenium vapor deposition

机译：金属有机化学气相沉积法使用液相前驱体制备银薄膜，并通过硒气相沉积法将其转化为硒化银薄膜

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摘要

A series of new Ag precursors containing beta-diketonate and neutral phosphite ligands were synthesized and characterized by various spectroscopic methods. These volatile precursors in liquid phase were thermally stable and quite useful in the preparation of silver thin films through bubbler-type chemical vapor deposition (CVD). In a typical case of silver (1) 1,1,1-trifluoro-2,4-pentanedionate triethyl phosphite adduct ((tfac)AgP(OEt)(3)) precursor, very pure silver thin films were obtained under relatively mild conditions without any appreciable amount of F, O, and P impurities. These thin films were easily converted to beta-orthorhombic silver selenide by simple selenium vapor deposition method. In scanning electron microscopic analyses, the average particle size of the latter was found to increase to about 1.26 mu m after gas-phase selenization reaction. (c) 2004 Elsevier B.V. All rights reserved.
机译：合成了一系列含有β-二酮酸酯和中性亚磷酸酯配体的新型Ag前驱体，并通过各种光谱方法对其进行了表征。这些处于液相的挥发性前体是热稳定的，并且在通过鼓泡型化学气相沉积（CVD）制备银薄膜中非常有用。在典型的银（1）1,1,1-三氟-2,4-戊二酸亚磷酸三乙酯亚磷酸酯加成物（（tfac）AgP（OEt）（3））前体中，在相对温和的条件下可获得非常纯的银薄膜不含任何数量的F，O和P杂质。通过简单的硒气相沉积法，这些薄膜很容易转变为β-斜方硒化银。在扫描电子显微镜分析中，发现在气相硒化反应后，后者的平均粒径增加到约1.26μm。 （c）2004 Elsevier B.V.保留所有权利。

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