Electrical, optical and mechanical properties of sputtered CrN_y and Cr_(1-x)Si_xN_(1.02) thin films

E. Martinez; R. Sanjines; O. Banakh; F. Levy

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Electrical, optical and mechanical properties of sputtered CrN_y and Cr_(1-x)Si_xN_(1.02) thin films

机译：溅射CrN_y和Cr_（1-x）Si_xN_（1.02）薄膜的电，光学和机械性能

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We have investigated the electrical, optical and mechanical properties of CrN_y and Cr_(1-x)Si_xN_(1.02) films as a function of N and Si contents near the fcc-CrN stoichiometric composition. Polycrystalline CrN_y with 0.93

机译：我们已经研究了CrN_y和Cr_（1-x）Si_xN_（1.02）薄膜的电，光学和机械性能，它们是fcc-CrN化学计量组成附近N和Si含量的函数。通过反应磁控溅射沉积具有0.93

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来源
《Thin Solid Films》 |2004年第1期|p.332-336|共5页
作者
E. Martinez; R. Sanjines; O. Banakh; F. Levy;
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作者单位

Institute of Physics of Complex Matter, FSB-EPFL, CH-1015 Lausanne, Switzerland;

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原文格式 PDF
正文语种 eng
中图分类工程材料学;
关键词
CrN; nitrides; Cr-Si-N; electrical properties; mechanical properties;

机译：CrN;氮化物;Cr-Si-N;电性能;力学性能;

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Electrical, optical and mechanical properties of sputtered CrN_y and Cr_(1-x)Si_xN_(1.02) thin films

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