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首页> 外文期刊>Thin Solid Films >Growth behavior and optical properties of metal-nanoparticle dispersed dielectric thin films formed by alternating sputtering
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Growth behavior and optical properties of metal-nanoparticle dispersed dielectric thin films formed by alternating sputtering

机译：交替溅射形成的金属纳米粒子分散介电薄膜的生长行为和光学性质

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摘要

Volmer-Weber type island growth mode was adopted to form nano-sized metal particles embedded in a dielectric matrix by the alternate deposition of metal and dielectric layers. Particle size and volume fraction were controlled by changing the nominal thickness of the metal layer and its ratio to that of dielectric layer, respectively. For comparison, the Au cluster formation was investigated in detail in both co-sputtered and alternatively sputtered films. Plan-view and cross-sectional transmission electron microscopy experiments combined with the optical absorption near the surface plasmon band show that well-defined Au metal spheres can be obtained by alternating sputtering, while closely spaced small particles, some connected and losing their sphericity even in the small volume fraction, are formed in the co-sputtered films. Their size was controlled by the volume fraction. The optical constants of the alternatively sputtered composite films were determined from spectroscopic ellipsometry measurements through the Maxwell-Garnett effective medium model fitting, considering the size dependent mean free path limitation of the free electrons. There was good agreement between simulated and measured optical spectra for the as-grown films.
机译：采用Volmer-Weber型岛生长模式，通过交替沉积金属层和电介质层来形成嵌入电介质基质中的纳米级金属颗粒。通过分别改变金属层的标称厚度及其与介电层的比率来控制粒度和体积分数。为了比较，在共溅射膜和交替溅射膜中都对金团簇的形成进行了详细研究。平面图和截面透射电子显微镜实验结合表面等离激元带附近的光吸收表明，通过交替溅射可以获得清晰的金金属球，而紧密间隔的小颗粒甚至在玻璃中仍会相互连接并失去球形性在共溅射膜中形成了小体积分数。它们的大小由体积分数控制。考虑到自由电子的尺寸依赖性平均自由程限制，通过麦克斯韦-加纳特有效介质模型拟合，通过椭圆偏振光谱测量法确定交替溅射的复合膜的光学常数。生长的薄膜在模拟光谱和测量光谱之间有很好的一致性。

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