New developments in X-ray fluorescence metrology

L.M. van der Haar; C. Sommer; M.G.M. Stoop

首页> 外文期刊>Thin Solid Films >New developments in X-ray fluorescence metrology

【24h】

New developments in X-ray fluorescence metrology

机译：X射线荧光计量学的新发展

获取原文

获取原文并翻译 | 示例

掌桥外文数据库（机构版） >>

开具论文收录证明 >>

文献代查 >>

页面导航

摘要
著录项
相似文献
相关主题

摘要

A new micro-spot XRF metrology tool has been developed that enables on-product production control of films and stacks used in the semiconductor and data storage industry. The tool has been evaluated using several thin films and stacks and the initial results verify the suitability of this micro-spot XRF method as an in-line metrology technique. Both the classical XRF analysis method as well as the fundamental parameter approach proved to be applicable. The successful combination of micro-spot excitation and fundamental parameter analysis makes the technique a powerful method for on-product characterization of single films and multi-layers.

机译：已经开发出一种新的微点XRF计量工具，该工具可以对半导体和数据存储行业中使用的薄膜和叠层进行产品生产控制。该工具已使用多个薄膜和叠层进行了评估，初步结果验证了这种微点XRF方法作为在线计量技术的适用性。经典的XRF分析方法和基本参数方法都被证明是适用的。微点激发和基本参数分析的成功结合使该技术成为单层膜和多层膜产品表征的强大方法。

著录项

来源
《Thin Solid Films》 |2004年第1期|p.90-96|共7页
作者
L.M. van der Haar; C. Sommer; M.G.M. Stoop;
展开▼
作者单位

PANalytical B.V., P.O. Box 13, 7600 AA Almelo, The Netherlands;

展开▼
收录信息
原文格式 PDF
正文语种 eng
中图分类工程材料学;
关键词
X-Ray fluorescence; micro-spot XRF; on-product characterization;

机译：X射线荧光;微点XRF;产物表征;

相似文献

外文文献
中文文献
专利

1. Grazing incident X-ray fluorescence combined with X-ray reflectometry metrology protocol of telluride-based films using in-lab and synchrotron instruments [J] . Pessoa W., Roule A., Nolot E., Spectrochimica Acta, Part B. Atomic Spectroscopy . 2018,第期

机译：使用实验室和同步仪器与基于碲化物的薄膜的X射线反射测量计量协议结合筛选入射X射线荧光性能
2. Development of Position-Sensitive Magnetic Calorimeters for X-Ray Astronomy These calorimeters can be used in x-ray metrology, materials microanalysis, and medical applications. [J] . Goddard Space Flight Center NASA Tech Briefs . 2011,第7期

机译：用于X射线天文学的位置敏感型磁热量计的开发这些热量计可用于X射线计量，材料微分析和医学应用。
3. Total reflection of x-ray fluorescence (TXRF): a mature technique for environmental chemical nanoscale metrology [J] . L Borgese, A Zacco, E Bontempi, Measurement Science & Technology . 2009,第8期

机译：X射线荧光（TXRF）的全反射：一种用于环境化学纳米级计量的成熟技术
4. Grazing Incidence X-ray Fluorescence (GI-XRF) For Thin Film And Ultra-thin Film Thickness Metrology [C] . Charles C Wang, Nimoal Sun, Jiang Lu, International Conference on Frontiers of Characterization and Metrology for Nanoelectronics . 2015

机译：用于薄膜和超薄膜厚度计量的放牧发病X射线荧光（GI-XRF）
5. Investigation of zinc in biological systems using X-ray absorption spectroscopy. I. EXAFS characterization of zinc-dependent alkyltransferase proteins. II. Exploring the role of zinc in the early development of Danio rerio embryos using X-ray fluorescence microprobe imaging and micro-xanes [D] . Peariso, Katrina L. 2000

机译：使用X射线吸收光谱法研究生物系统中的锌。 I.锌依赖性烷基转移酶蛋白的EXAFS表征。二。使用X射线荧光微探针成像和微黄烷探索锌在Danio rerio胚胎早期发育中的作用
6. Development of a speckle-based portable device for in situ metrology of synchrotron X-ray mirrors [O] . Yogesh Kashyap, Hongchang Wang, Kawal Sawhney -1

机译：用于同步加速器X射线镜原位测量的基于斑点的便携式设备的开发
7. Development and Metrology of Extreme Ultraviolet and soft X-ray Multilayer Mirrors [O] . Sertsu Mewael Giday 2016

机译：极紫外和软X射线多层镜的研制与计量
8. X-Ray 3D Metrology System for SOFC Development [R] . Wang, S. 2007

机译：用于sOFC开发的X射线3D计量系统

New developments in X-ray fluorescence metrology

摘要

著录项

相似文献

相关主题

期刊订阅