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Experiments and numerical calculations for the interpretation of the backside wet etching of fused silica

机译：用于解释熔融石英背面湿法蚀刻的实验和数值计算

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摘要

Experimental investigations and thermal calculations of laser induced backside wet etching (LIBWE) of fused silica are presented. Fused silica plates having 1 mm thickness were irradiated by an ArF excimer laser in the presence of liquid absorber. The absorbing liquids were naphthalene- methyl-methacrylate solutions with different concentrations (0, 0.21, 0.43, 0.85 and 1.71 mol/dm~3). The absorption coefficients (α) of these solutions at the applied wavelength were determined using a plano-concave microcuvette. It was found that the value of a could be varied in the range of 39400-62300 cm~(-1) by the change of the naphthalene content. The dependence of the etch rate on both the absorption coefficient of the liquid absorbers and the applied fluence was studied. The etch depths were measured by an atomic force microscope. At 450 mJ/cm~2 laser fluence, the etch rates were found to be between 13.3 and 22.2 nm/pulse depending on the actual absorption coefficient. In the next experiment the laser fluence was varied from 110 to 860 mJ/cm~2 and the etch rate was found to vary between 4.7 and 49.5 nm/pulse when the concentration of the applied solution was constant 0.85 mol/dm~3. The mechanism of the LIBWE can be explained in the first approximation by thermal effects and their consequences. We calculated the maximal depth of melted fused silica layer by numerical solution of the one-dimension heat flow equation taking into account the phase transformations of the liquid reagents and the fused silica target. These calculations proved that the thickness of the melted quartz layer depends linearly on both of the absorption coefficient of the liquid and the laser fluence. Our calculations give an upper estimation of the etch rate. On the basis of our results a possible interpretation of the LIBWE was suggested.
机译：介绍了激光诱导熔融石英背面湿法刻蚀（LIBWE）的实验研究和热计算。在液体吸收剂的存在下，用ArF受激准分子激光辐照厚度为1mm的熔融石英板。吸收液体是具有不同浓度（0、0.21、0.43、0.85和1.71 mol / dm〜3）的萘-甲基丙烯酸甲酯溶液。使用平凹微比色皿测定这些溶液在施加波长下的吸收系数（α）。结果发现，通过改变萘含量，α值可以在39400-62300 cm〜（-1）范围内变化。研究了蚀刻速率对液体吸收剂吸收系数和所施加注量的依赖性。蚀刻深度通过原子力显微镜测量。在450 mJ / cm〜2的激光能量密度下，根据实际的吸收系数，蚀刻速率被发现在13.3和22.2 nm /脉冲之间。在下一个实验中，当施加溶液的浓度恒定为0.85 mol / dm〜3时，激光通量在110到860 mJ / cm〜2之间变化，并且蚀刻速率在4.7和49.5 nm /脉冲之间变化。 LIBWE的机理可以通过热效应及其后果在第一近似中解释。我们通过一维热流方程的数值解计算了熔融二氧化硅层的最大深度，其中考虑了液体试剂和熔融二氧化硅靶的相变。这些计算证明，熔融石英层的厚度线性地取决于液体的吸收系数和激光能量密度。我们的计算给出了蚀刻速率的较高估计。根据我们的结果，建议对LIBWE进行可能的解释。

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