Multilayers, alloys, and complex profiles by pulsed laser deposition using a novel target geometry

P.R. Willmott; R. Herger; C.M. Schlepuetz

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Multilayers, alloys, and complex profiles by pulsed laser deposition using a novel target geometry

机译：使用新型靶材几何结构通过脉冲激光沉积形成多层，合金和复杂轮廓

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A novel ablation target geometry is presented, whereby an ablation rod is divided into two or more sections and rapidly cyclically translated along its axis. In this manner, a wide range of film compositions can be achieved using the same target. The flexibility of this technique is demonstrated for the growth of quasicrystalline and complex metal oxide thin films.

机译：提出了一种新颖的消融目标几何形状，其中消融棒被分为两个或更多部分，并沿其轴快速循环平移。以这种方式，使用相同的靶可以实现多种膜组成。证明了该技术对于准晶和复合金属氧化物薄膜生长的灵活性。

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来源
《Thin Solid Films》 |2004年第4期|p.436-439|共4页
作者
P.R. Willmott; R. Herger; C.M. Schlepuetz;
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作者单位

Swiss Light Source, Paul Scherrer Institute, CH-5232 Villigen, Switzerland;

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原文格式 PDF
正文语种 eng
中图分类工程材料学;
关键词
pulsed laser deposition; thin films; perovskites; quasicrystals; complex metal oxides;

机译：脉冲激光沉积薄膜钙钛矿准晶体复合金属氧化物;

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1. Effects Of Target-substrate Geometry And Ambient Gas Pressure On Fept Nanoparticles Synthesized By Pulsed Laser Deposition [J] . J.J. Lin, L.S. Loh, P. Lee, Applied Surface Science . 2009,第8期

机译：目标基板的几何形状和环境气压对脉冲激光沉积合成的Fept纳米粒子的影响
2. Pulsed laser deposition of atomically flat La_(1-x)Sr_xMnO_3 thin films using a novel target geometry [J] . P.R.WILLMOTT, R. HERGER, M.C. FALUB, Applied Physics. A, Materials Science & Processing . 2004,第4a6期

机译：使用新型靶几何结构的脉冲激光沉积原子平坦的La_（1-x）Sr_xMnO_3薄膜
3. The effect of relative plasma plume delay on the properties of complex oxide films grown by multi-laser, multi-target combinatorial pulsed laser deposition [J] . Katherine A. Sloyan, Timothy C. May-Smith, Robert W. Eason, Applied Surface Science . 2009,第22期

机译：相对羽流延迟对多激光，多靶组合脉冲激光沉积生长复合氧化物膜性能的影响
4. Modeling of single pulse 3-D energy deposition profiles inside dielectrics upon fs laser irradiation with complex beam wavefronts [C] . J. Hoyo, M. Galvan-Sosa, A. Ruiz de la Cruz, Optical modelling and design III . 2014

机译：复杂束波前的fs激光辐照时电介质内部单脉冲3-D能量沉积分布图的建模
5. The fabrication of heusler alloy thin films from multiphase targets using pulsed laser deposition. [D] . Patton, Heather M. A. 2009

机译：使用脉冲激光沉积从多相靶材制造Heusler合金薄膜。
6. Laser Direct Metal Deposition of 2024 Al Alloy: Trace Geometry Prediction via Machine Learning [O] . Fabrizia Caiazzo, Alessandra Caggiano 2018

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7. The effect of relative plasma plume delay on the properties of complex oxide films grown by multi-laser multi-target combinatorial pulsed laser deposition [O] . Sloyan Katherine A., May-Smith Timothy C., Eason Robert W., 2009

机译：相对等离子体羽流延迟对多激光多靶组合脉冲激光沉积复合氧化膜性能的影响
8. Pulsed Laser Deposition of Magnetic Multilayers for the Grant Entitled Laser Processing of Advanced Magnetic Materials [R] . Sorescu, M. 2003

机译：脉冲激光沉积磁性多层膜用于激光加工先进磁性材料

Multilayers, alloys, and complex profiles by pulsed laser deposition using a novel target geometry

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