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Epitaxial bilayers and trilayers of superconducting and high K materials grown by PLD for microwave applications

机译：PLD为微波应用生长的超导和高K材料的外延双层和三层

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Due to their high dielectric constant and low losses properties, Ba_xSr_(1-x)TiO_3 (BSTO) compounds are interesting candidates as capacitor dielectrics. The similarity of their lattice parameters with the YBa_2Cu_3O_(7-δ) (YBCO) high-T_c superconductor, allows high quality multilayers growth and offers the possibility to combine low microwave losses in superconding electrodes with electric control of the dielectric constant, to realize electrically tunable low loss microwave devices. In this paper, we present a study of in situ fabrication of superconducting YBCO/ferroelectric BSTO bilayers and YBCO/BSTO/YBCO trilayers on MgO substrates using pulsed laser deposition (PLD). Growth mechanisms and microstructures are investigated by MET, SEM and RHEED analyses. AC and DC electrical characterizations are done to study the conduction mechanisms. The aim of these studies is to control 'in situ' epitaxial growth of the bilayers (300 nm for YBCO and from 300 to 900 nm for BSTO) in order to develop low temperature superconducting YBCO/ferroelectric BSTO/superconducting trilayers capacitors, the capacitance of which can be tuned via an applied DC electric field. Parallel plate capacitors are prepared by consecutive in situ deposition of the constituent layers. A tunable YBCO/BSTO_(x=0.67)/YBCO capacitor have been realized with good electrical characteristic at 77 K.
机译：由于Ba_xSr_（1-x）TiO_3（BSTO）化合物具有高介电常数和低损耗的特性，因此它们作为电容器电介质是令人感兴趣的候选物。它们的晶格参数与YBa_2Cu_3O_（7-δ）（YBCO）高T_c超导体的相似性，允许高质量的多层生长，并提供将超导电极中的低微波损耗与介电常数的电控制相结合的可能性。可调谐的低损耗微波设备。在本文中，我们介绍了使用脉冲激光沉积（PLD）在MgO衬底上原位制备YBCO /铁电BSTO双电层和YBCO / BSTO / YBCO三层原位制备的研究。通过MET，SEM和RHEED分析研究了生长机理和微观结构。进行了交流和直流电特性分析以研究传导机理。这些研究的目的是控制双层的“原位”外延生长（YBCO为300 nm，BSTO为300至900 nm），以便开发低温YBCO /铁电BSTO /超导三层电容器，可以通过施加的直流电场对其进行调谐。通过连续原位沉积组成层来制备平行板电容器。已经实现了在77 K时具有良好电特性的可调谐YBCO / BSTO_（x = 0.67）/ YBCO电容器。

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