Growth of ReS_2 thin films by pulsed laser deposition

Vishal B.; Sharona H.; Bhat U.; Paul A.; Sreedhara M. B.; Rajaji V; Sarma S. C.; Narayana C.; Peter S. C.; Datta R.

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Growth of ReS_2 thin films by pulsed laser deposition

机译：脉冲激光沉积的RES_2薄膜的生长

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We present results on growth of ReS2 thin film both on c plane sapphire substrate and MoS2 template by pulsed laser deposition (PLD). Films tend to grow with (0001)ReS2 perpendicular to (0001) Al2O3 and (0001)ReS2 perpendicular to (0001) MoS2 parallel to (0001) Al2O3 at deposition temperature below 300 degrees C. Films are polycrystalline grown at temperature above 300 degrees C. The smoothness and epitaxial quality of the films are significantly improved when grown on MoS2 template compared to sapphire substrate. The results show that PLD is suitable to grow ReS2 thin film over large area (10 x 10 mm(2)) for practical device application.

机译：通过脉冲激光沉积（PLD），我们呈现C平面蓝宝石基板和MOS2模板上的RES2薄膜的生长。薄膜倾向于（0001）垂直于（0001）Al2O3和（0001）垂直于（0001）MOS2的Res2和（0001）的res2平行于（0001）Al 2 O 3，低于300摄氏度的沉积温度，在温度高于300℃的温度下薄膜生长。与蓝宝石衬底相比，在MOS2模板上生长时，薄膜的平滑度和外延质量显着提高。结果表明，PLD适用于在大面积（10×10mm（2））上生长Res2薄膜，用于实用装置应用。

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《Thin Solid Films》 |2019年第1期|81-87|共7页
作者
Vishal B.; Sharona H.; Bhat U.; Paul A.; Sreedhara M. B.; Rajaji V; Sarma S. C.; Narayana C.; Peter S. C.; Datta R.;
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Jawaharlal Nehru Ctr Adv Sci Res Int Ctr Mat Sci Chem & Phys Mat Unit Bangalore 560064 Karnataka India;

Jawaharlal Nehru Ctr Adv Sci Res Int Ctr Mat Sci Chem & Phys Mat Unit Bangalore 560064 Karnataka India;

Jawaharlal Nehru Ctr Adv Sci Res Int Ctr Mat Sci Chem & Phys Mat Unit Bangalore 560064 Karnataka India;

Jawaharlal Nehru Ctr Adv Sci Res Int Ctr Mat Sci Chem & Phys Mat Unit Bangalore 560064 Karnataka India;

Jawaharlal Nehru Ctr Adv Sci Res Int Ctr Mat Sci Chem & Phys Mat Unit Bangalore 560064 Karnataka India;

Jawaharlal Nehru Ctr Adv Sci Res Int Ctr Mat Sci Chem & Phys Mat Unit Bangalore 560064 Karnataka India;

Jawaharlal Nehru Ctr Adv Sci Res New Chem Unit Bangalore 560064 Karnataka India|Jawaharlal Nehru Ctr Adv Sci Res Sch Adv Mat Bangalore 560064 Karnataka India;

Jawaharlal Nehru Ctr Adv Sci Res Int Ctr Mat Sci Chem & Phys Mat Unit Bangalore 560064 Karnataka India;

Jawaharlal Nehru Ctr Adv Sci Res New Chem Unit Bangalore 560064 Karnataka India|Jawaharlal Nehru Ctr Adv Sci Res Sch Adv Mat Bangalore 560064 Karnataka India;

Jawaharlal Nehru Ctr Adv Sci Res Int Ctr Mat Sci Chem & Phys Mat Unit Bangalore 560064 Karnataka India;

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Rhenium disulphide; Molybdenum disulphide; Thin films; 2D materials;

机译：铼二硫化物;二硫化钼;薄膜;2D材料;

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Growth of ReS_2 thin films by pulsed laser deposition

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