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Microtribology of silicon, oxide, and carbide surfaces

机译：硅，氧化物和碳化物表面的微摩擦学

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摘要

This paper presents an overview of the microtribological properties of silicon oxide, sapphire, and titanium carbide surfaces as well as a self-assembled monolayer with respect to their application in microsystems. Testing was performed with a reciprocating microtribometer with normal loads in the micronewton to millinewton range. Silicon and titanium carbide balls were used as counterbodies. For silicon oxide, sapphire and a perfluorodecyl-trichlorosilane self-assembled monolayer (FDTS), the microfriction corresponds to the water contact angle when the smoother titanium carbide ball or the relatively rougher silicon ball was used as a counterbody. Microfriction measurements performed on tribopairs of the same material, but having different roughnesses, showed that the friction of the rougher tribopairs is lower than that of the smoother ones. Interestingly, in the microforce regime, reduction in friction was significant and almost as much as when hydropho-bic self-assembled monolayers are applied on smooth surfaces. This investigation showed that comparative microtribological investigations between different material systems can be very challenging due to the fact that comparable roughness values on samples and countersamples are difficult to realize.
机译：本文概述了氧化硅，蓝宝石和碳化钛表面以及自组装单层在微系统中的应用方面的摩擦学特性。用往复式微摩擦计在微牛顿至毫牛顿范围内的正常载荷下进行测试。硅和碳化钛球被用作counter。对于氧化硅，蓝宝石和全氟癸基-三氯硅烷自组装单分子层（FDTS），当将较光滑的碳化钛球或相对较粗糙的硅球用作配体时，微摩擦对应于水接触角。对具有相同粗糙度但粗糙度不同的材料的摩擦副进行的微摩擦测量表明，较粗糙的摩擦副的摩擦系数低于较光滑的摩擦副的摩擦系数。有趣的是，在微力状态下，摩擦力的降低非常显着，几乎与疏水性自组装单分子层应用于光滑表面时的摩擦力一样大。这项研究表明，由于难以实现样品和反样品上具有可比性的粗糙度值，因此不同材料系统之间的比较微生物学研究可能非常具有挑战性。

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