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Peculiarities of structurization in laser oxide condensates under vapour stream rapid condensation conditions

机译:蒸气流快速冷凝条件下激光氧化物冷凝物中结构化的特殊性

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摘要

Some aspects of MO_2 and M_2O_3(M=Ti, Zr, Hf, M'=Al, Sc, Y, La-Lu) oxide film formation during laser evaporatiion of the oxides are studied. Phase formation processes and crystallite grows as function of substrate temperature are investigated. It was shown that structure formation in the thin laser condensates is determined by regime of temperature precipition which governe the level of interior stresses in the films studied.
机译:研究了氧化物激光蒸发过程中MO_2和M_2O_3(M = Ti,Zr,Hf,M'= Al,Sc,Y,La-Lu)氧化物膜形成的某些方面。研究了相形成过程和微晶生长随衬底温度的变化。结果表明,薄的激光冷凝物中的结构形成是由温度沉淀的方式决定的,该温度决定了所研究薄膜的内部应力水平。

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