電子顕微鏡は物質・材料の解析や分析の先端研究から産業rn応用まで幅広く利用されている．顕微鏡のもつ高い空間分解rnは，低温・高温・高圧・真空・液中など多様な環境下での3rn次元構造形態や分光計測さらに動態観察などとあわせて，ナrnノ材料，ナノテク，バイオ分野を牽引している．%Aberration correted electron microscopy (ACEM) has improved resolution to sub-angstrom regime, which allows us to study materials with light elements, with dopants and defects, and with electronic, magnetic and optical functions. Developments of ACEMs and applications that undertaken in the world are briefly reviewed, being focused particularly on 50 pm resolution STEM and TEM instrumentation.
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