単原子観察の可能性を論じた1949年のシェルツァーの論rn文以来，透過型電子顕微鏡（TEM）による原子レベルの試rn料の観察については人類のあくなき努力が続けられてきたrnが，汎用の200kV-TEMの点分解能はここ20年ほどの間rn0.2nm程度にとどまっており，本当の意味での原子直視観rn察には今一歩の感があった．%Recent development of spherical aberration correction in high-resolution transmission electron microscopy (C_s-corrected HRTEM) is reviewed by focusing on its application to nano-materials. Basis of the HRTEM imaging and new scientific advantage of C_s-corrected TEM are summarized, and recent applications of the method to high resolution imaging and selected area electron diffraction of nano-materials and interfaces are described as well as explaining its characteristic and the future prospects.
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