近年，電子顕微鏡の対物レンズの球面収差を補正する装置rn（Csコレクター）が実用化され,加速電圧が200kVクラスrnの電子顕微鏡で，0.1nm（100pm）程度の分解能が得られrnるようになり，物質の高分解能観察・分析が飛躍的に進んでrnいる．欧米では大型プロジェクトが進行し，先端機器開rn発競争が繰り広げられている．%A domestic spherical aberration corrected 300 kV transmission electron microscope named R005, which stands for 0.05 nm resolution, was developed. It has double aberration correctors in probe-forming and image-forming systems for high-resolution scanning transmission electron microscope (STEM) and conventional transmission electron microscope (TEM) observation. Asymmetric corrector optic system was developed to compress the parasitic aberration and the increase of chromatic aberration. Automatic aberration correction systems for STEM and TEM have been implemented. Neighboring atomic columns of Ga (63 pm spacing) in a GaN [211] crystalline specimen was resolved in a high angle annular dark field (HAADF) STEM image for the first time.
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