近年，周波数変調（FM）検出法を用いた非接触原子間rn力顕微鏡（NC－AFM）の大きな進展により，超高真空rn（UHV）中において，表面の結晶構造や力学的相互作用（例rnえば，エネルギー散逸など）を原子・分子レベルで測定できrnるようになった．NC－AFMは，探針・試料間に作用する物rn理量として原子間力を用いているため，測定試料に対する制rn約が原理的になく，導電性の試料表面だけでなく絶縁性の試rn料表面も観察できるという大きな利点を有している．%Noncontact atomic force microscopy (NC-AFM) using frequency modulation detection method has been widely used to investigate the various surfaces with atomic resolution. In this paper, we introduce the measurement technique of NC-AFM operating at low tern-peratures (LTs). First, we theoretically discuss the enhancement of the force sensitivity in NC-AFM operating at LTs. Then, we present the design and performance of LT-NC-AFM using fiber optic interferometer with quick sample and cantilever exchange mechanism. We also show the present status of the LT-NC-AFM imaging. In detail, we show the experimental results to investigate the influence of the surface stress around an SA step of Si (001) surface onto the buckled dimer at 5 K. We demonstrate that the LT-NC-AFM has a capability to detect the surface stress with atomic resolution.
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