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Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems
Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems
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1.
Impact of Thermal Behavior on ZRO in an Electro-magnetically Driven Microgyroscope
机译:
电磁驱动微仪中Zro热行为对Zro的影响
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
computational fluid dynamics;
gyroscopes;
micromechanical devices;
thermal properties;
MEMS;
Q-factor;
electromagnetic driving;
glass-silicon-glass device structure;
microgyroscope;
proof mass;
thermal behavior;
zero rate offset;
CFD;
ZRO;
imperfection;
2.
Enhancement of Phase Change Heat Transfer by using Surface Energy Patterning Techniques
机译:
使用表面能图案化技术提高相变热传递
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
condensation;
drops;
heat exchangers;
heat transfer;
micromechanical devices;
nucleation;
surface energy;
Brownian movement;
coalescence;
heat pipe;
microscale heat exchanger;
phase change;
random condensing droplets;
subcooled substrate;
substrate surface;
superheated vapor;
surface energy patterning;
water droplets;
droplet;
3.
Improved Mach Zehnder Optical Modulators with Modified Ridge Structure
机译:
改进的Mach Zehnder光调制器,具有改进的脊结构
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
CAD;
coplanar waveguides;
finite element analysis;
light transmission;
optical modulation;
optical waveguides;
travelling wave tubes;
BPM CAD waveguide software;
Mach Zehnder optical modulators;
computer aided design;
coplanar waveguide traveling wave electrode;
finite element method;
ridge structure;
transmission loss;
Mach-Zehnder optical modulator;
Mach-Zehnder waveguide;
Optical modulator;
taper structure;
traveling wave electrode;
4.
The Synthesis and Nanotribology Study of MS
2
Nanotube
机译:
MS
2 sub>纳米管的合成和纳米学研究
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
X-ray diffraction;
chemical vapour infiltration;
friction;
molybdenum compounds;
nanotechnology;
nanotubes;
niobium compounds;
pyrolysis;
scanning electron microscopy;
transmission electron microscopy;
tungsten compounds;
MoSlt;
subgt;
2lt;
/subgt;
NbSlt;
subgt;
2lt;
/subgt;
SEM;
TEM;
WSlt;
subgt;
2lt;
/subgt;
XRD;
alumina template;
atomic friction microscope;
chemical vapor transportation reaction;
decomposition method;
friction coefficient;
friction tests;
lamellar structures;
nanotube growth mechanism;
nanotube tribological properties;
niobium disulfide nanotubes;
pin-on-disc tester;
quartz ampoules;
scanning electronic microscope;
transition metal dichalcogenide nanotube nanotribology;
transition metal dichalcogenide nanotube synthesis;
transmission electronic microscope;
tungsten sulfide nanotubes;
Transition metal dichalcogenide;
nanotribology;
niobium disulfide;
tungsten disulfide;
5.
Investigation on a Novel Dual-Grating Macro-Micro Driven High Speed Precision Positioning System for NEMS
机译:
新型双光栅宏观微量驱动的NEMS的调查
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
actuators;
finite element analysis;
lead compounds;
micromechanical devices;
nanopositioning;
piezoelectric devices;
MEMS;
NEMS;
PZT;
PbZrTiOlt;
subgt;
3lt;
/subgt;
dual-grating;
macro-micro driving;
micro actuator;
microelectromechanical system;
nanoelectromechanical system;
piezoelectric;
precision positioning system;
voice coil motors;
XY-stage;
high speed high accuracy;
macro-micro driven;
6.
Pressure Aided Low Temperature Direct Bonding of Silicon Wafers with High Surface Roughness
机译:
高表面粗糙度的硅晶片的压力辅助低温直接粘合
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
bonding processes;
micromechanical devices;
surface roughness;
tensile testing;
wafer bonding;
0.5 nm;
1.0 nm;
300 micron;
525 micron;
Si;
bonding strength;
contact pressure;
hydrophilic wafer bonding;
silicon wafers;
wafer thickness;
direct bonding;
silicon wafer;
7.
Application of Intelligent Flexible Skin Sensors for Interfacing with Robotic Pets
机译:
智能柔性皮肤传感器在机器人宠物界面中的应用
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
fuzzy systems;
haptic interfaces;
human computer interaction;
intelligent robots;
intelligent sensors;
microsensors;
tactile sensors;
MEMS technique;
fuzzy unit;
intelligent flexible skin sensors;
microelectromechanical systems;
normal forces;
robotic pets;
sensor array design;
shear forces;
touching force information;
fuzzy neural network;
robotic pet;
skin sensor;
8.
Investigation into High Performance High current Ultra Low Dropout Regulator
机译:
高性能高电流超低压差稳压器的研究
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
controllers;
nanotechnology;
network synthesis;
silicon-on-insulator;
18 V;
3 A;
5.0 V;
NEMS;
PNP transistor;
bandgap reference source;
circuit design;
circuit power;
low dropout regulator;
nano devices;
output resistive sampling network;
power variation effect;
quiescent current;
voltage regulation enhancement;
SOI complementary bipolar process;
pre-reference;
trim;
ultra-low dropout;
9.
A New Packaging Method for Pressure Sensors by PDMS MEMS Technology
机译:
PDMS MEMS技术的压力传感器新包装方法
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
micromechanical devices;
piezoresistive devices;
pressure sensors;
spin coating;
wafer level packaging;
293 to 298 K;
PDMS MEMS technology;
Pyrex glass wafer;
Teflon disks;
piezoresistive pressure sensors;
polydimethylsiloxane sheet;
spin-coating;
wafer-level packaging;
PDMS;
package;
piezoresistive;
pressure sensor;
10.
Preliminaries of Six-Degree-of-Freedom Ultra Resolution Metrology with Laser Beams and Convex Mirrors
机译:
具有激光束和凸镜的六自由度超分辨率计量的预备
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
measurement by laser beam;
micro-optomechanical devices;
mirrors;
nanotechnology;
Jacobian partial derivative matrix;
MATLAB;
MEMS;
NEMS;
convex mirrors;
geometric optics;
laser beams;
microelectromechanical systems;
nanoelectromechanical systems;
photodetectors;
six-degree-of-freedom ultraresolution metrology;
ultra precision measurement systems;
11.
Photonic Properties of Silicon-on-Glass Nano-Films and its Fabrication
机译:
硅片纳米膜的光子性能及其制造
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
anodisation;
elemental semiconductors;
etching;
glass;
integrated optics;
micro-optics;
nanotechnology;
optical fabrication;
optical films;
silicon;
Si-SiOlt;
subgt;
2lt;
/subgt;
anodic boning;
nanophotonics;
silicon-on-glass nanofilms;
SOG-based nano-film;
fabrication;
photonic properties;
selective etching;
12.
Experimental and Numerical Research on the Flow in Microchannel with Barriers
机译:
微通道与障碍流量的实验性和数值研究
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
microchannel flow;
mixing;
numerical analysis;
velocimeters;
velocity measurement;
barriers;
chaotic mixing;
electrochemical engineering;
linked twist maps;
microfluidic biochip;
microresolution particle image velocimetry;
microspace;
numerical simulation;
velocity field measurement;
Micro-PIV;
microchannel;
13.
Design of a PMMA Chip for Selective Extraction of Size-Fractioned DNA
机译:
PMMA芯片的设计,用于选择性提取尺寸分馏DNA
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
DNA;
electrophoresis;
lab-on-a-chip;
microfluidics;
numerical analysis;
DNA electrophoresis;
DNA extraction;
DNA fragment extraction;
PMMA chip;
biology analysis;
chip-based electroelution;
numerical simulation;
selective extraction;
size-fractioned DNA;
14.
Comparative Study of Size Effect of Micro Bubble Dynamics by Sub-100 Microsecond and Millisecond Pulse Heating
机译:
微泡沫动力学尺寸与毫秒脉冲加热的比较研究
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
boiling;
bubbles;
microactuators;
microfluidics;
stroboscopes;
thermal diffusion;
1.66 ms;
40 mus;
boiling pattern;
bubble actuator critical size;
bubble collapse;
critical heater size;
heating pulse width;
microbubble actuators;
microbubble dynamics;
microsecond pulse heating;
millisecond pulse heating;
size effect;
stroboscopic video microscopy;
thermal diffusion length;
bubble dynamics;
homogeneous boiling;
micro bubble actuator;
15.
Design, Fabrication and Measurement of a Resonant Tunneling Diode Based Micro Accelerometer
机译:
基于谐振隧道二极管的微加速度计的设计,制造和测量
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
accelerometers;
micromechanical devices;
piezoresistance;
resonant tunnelling diodes;
Raman spectroscopy;
electronic scanning probe station;
fiber testing system;
piezoresistive micro accelerometers;
piezoresistive sensitivity;
resonant tunneling diode;
semiconductor parameter analyzer;
1-V characteristic;
GaAs;
piezoresistive effect;
sensitivity;
16.
Complex Flow and Heat Transfer Behavior of Micro/nano Fluidics: Benard Convection Always Occurs in a NEMS World
机译:
微/纳米流体的复杂流动和传热行为:贝尔特对流总是发生在NEMS世界中
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
Benard convection;
heat transfer;
microfluidics;
nanotechnology;
turbulence;
Benard convection cell;
MEMS;
NEMS;
complex flow;
heat transfer behavior;
heat transfer patterns;
micro-electromechanical systems;
microscale thermal-hydraulics;
nano-electromechanical systems;
nanofluidics;
nanoscale liquid film;
nanoscale thermal-hydraulics;
micro/nanofluidics;
17.
A novel out-of-plane MEMS tunneling accelerometer with excellent low frequency resolution
机译:
一种新型外平面MEMS隧道加速度计,具有优异的低频分辨率
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
accelerometers;
circuit feedback;
integrated circuit design;
masks;
microsensors;
tunnelling;
ICP based tunneling accelerometer;
accelerometer resolution;
double mask ICP process;
feedback circuit;
frequency 1 Hz to 100 Hz;
knife-blades;
open-loop characterization;
out-of-plane MEMS tunneling accelerometer;
ICP;
MEMS;
tunneling accelerometer;
18.
Research on Application of MEMS Accelerometer in Target Classification by Advanced Information Processing
机译:
MEMS加速度计在目标分类中的应用研究通过高级信息处理
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
accelerometers;
genetic algorithms;
micromechanical devices;
neural net architecture;
seismic waves;
vehicles;
ANNCGA;
MEMS accelerometer application;
advanced information processing;
artificial neural networks combined with genetic algorithm;
seismic signals;
target classification;
vehicle targets;
MEMS accelerometer;
information processing;
19.
A Monolithic Triaxial Micromachined Silicon Capacitive Gyroscope
机译:
单片三轴微机械硅电容陀螺仪
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
capacitance;
finite element analysis;
glass;
gyroscopes;
micromechanical devices;
silicon;
ANSYS8.1 program;
Si;
bulk silicon wafer;
electrostatic force;
finite element method;
glass substrate;
monolithic triaxial micromachined vibratory gyroscope;
sensing capacitance;
triaxial gyroscope;
uniaxial gyroscopes;
bulk micromachining;
micromachined gyroscope;
silicon on glass;
20.
Cu/Sn Isothermal Solidification Technology for Hermetic Packaging of MEMS
机译:
用于MEMS的密封包装的CU / SN等温凝固技术
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
bonding processes;
copper alloys;
hermetic seals;
isothermal transformations;
micromechanical resonators;
solidification;
tin alloys;
wafer level packaging;
350 C;
Cu-Sn;
MIL-STD-883E;
bonding process optimization;
bonding temperature;
copper-tin isothermal solidification;
hermeticity;
intermediate multilayer structure;
leak rate;
microresonator;
sealing ring pattern;
shear strength;
wafer level hermetic MEMS packaging;
Isothermal solidification (IS);
MEMS;
hermetic packaging;
21.
An Improved 3D Simulator for MEMS Processes
机译:
用于MEMS流程的改进的3D模拟器
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
evolutionary computation;
micromechanical devices;
sputter etching;
3D display interface;
3D represent layer;
3D simulator;
3D surface simulator;
DRIE processes;
MEMS processes;
WTK virtual environment;
anisotropic etching;
evolution algorithm;
material cell-removal model;
physical processes model interface;
surface evolution models;
surface string model;
ICP;
MEMS;
Process;
22.
Cytotoxic Effect of As2S3 Nanoparticles on Liver Cancer Cells
机译:
As2S3纳米粒子对肝癌细胞的细胞毒性作用
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
arsenic compounds;
biomedical materials;
cancer;
cellular biophysics;
liver;
nanobiotechnology;
nanoparticles;
patient treatment;
tumours;
Aslt;
subgt;
2lt;
/subgt;
Slt;
subgt;
3lt;
/subgt;
Aslt;
subgt;
2lt;
/subgt;
Slt;
subgt;
3lt;
/subgt;
nanoparticle cytotoxic effects;
Aslt;
subgt;
2lt;
/subgt;
Slt;
subgt;
3lt;
/subgt;
nanoparticle preparation method;
EDS;
antitumor effects;
cellular apoptosis;
energy dispersive spectrometry;
flow cytometry assay;
human cancer treatment;
liver cancer SMMC-7721 cells;
liver cancer cells;
methyl thiazolyl tetrazolium assay;
optical microscopy;
transmission electron microscopy;
As2S3;
SMMC-7721 cell;
Tumor;
23.
Measurement System for MEMS Dynamics Characterization with Environmental Control Facility
机译:
具有环境控制设施的MEMS动力学特性测量系统
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
control facilities;
crystal microstructure;
dynamic testing;
environmental testing;
measurement systems;
micromechanical devices;
motion measurement;
optical images;
phase shifting interferometry;
stroboscopes;
surface morphology;
3D motions;
AFM cantilevers;
MEMS dynamics characterization;
MEMS products;
base excitation;
environmental control facility;
hybrid block matching algorithm;
in-plane displacement;
measurement system;
microelectromechanical systems;
microresonator arrays;
microstructure dynamics testing;
microstructures;
microvision;
pressure sensor membranes;
printed circuit boards;
stroboscopic illumination;
subpixel resolution;
surface deformations;
surface shapes;
MEMS;
dynamics characterization;
interferometry;
24.
Polymer-based Capacitive Micromachined Ultrasonic Transducers (CMUT) for Micro Surgical Imaging Applications
机译:
基于聚合物的电容式微机械超声换能器(CMUT),用于微观外科成像应用
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
finite element analysis;
image processing;
mathematics computing;
polymers;
ultrasonic transducers;
ANSYS simulations;
DC actuation voltage;
MATLAB simulations;
capacitive micromachined ultrasonic transducers;
low temperature fabrication process;
microsurgical imaging;
polymer membrane;
silicon nitride membrane;
capacitve;
polymer;
transducer;
ultrasonic;
25.
Design Conceits and Testing of a Prototype Micro Thermophotovoltaic System
机译:
设计自觉和测试原型微蒸热热源系统
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
III-V semiconductors;
combustion;
gallium compounds;
silicon compounds;
thermophotovoltaic cells;
wide band gap semiconductors;
1.032 A;
1.355 W;
1.85 V;
GaSb;
SiC;
dielectric filter;
microcombustor;
micromechanical devices;
microthermophotovoltaic system;
open-circuit voltage;
photovoltaic cell array;
semiconductor emitter;
short-circuit current;
Micro combustor;
Micro thermophotovoltaic system;
Photovoltaic array;
26.
A Hybrid Nano-Imprinting Lithography Based on Infrared Pulsed Laser Heating
机译:
一种基于红外脉冲激光加热的混合纳米压印光刻
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
laser materials processing;
nanolithography;
pulsed laser deposition;
resists;
soft lithography;
1064 nm;
Nd-YAG pulsed laser;
high intensity IR laser pulse;
hybrid nanoimprinting lithography;
infrared pulsed laser heating;
laser-assisted direct imprinting method;
nanofabrication;
resist layer;
silicon mold;
thermal drifting;
Infrared;
imprinting;
lithography;
pulsed laser;
27.
A Novel Method of Preparing Magnetofluid
机译:
一种制备磁流体的新方法
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
X-ray diffraction;
ferrites;
infrared spectra;
magnetic fluids;
magnetic particles;
materials preparation;
organic-inorganic hybrid materials;
superparamagnetism;
2 hrs;
Felt;
subgt;
3lt;
/subgt;
Olt;
subgt;
4lt;
/subgt;
Felt;
subgt;
3lt;
/subgt;
Olt;
subgt;
4lt;
/subgt;
magnetofluid;
complexation;
coordination number;
coordination stability constant;
coordination transformation method;
ferric ion;
ferric oxide;
in situ reduction;
magnetofluid preparation;
polyvinyl alcohol;
superparamagnetic particles;
transmission electron microscope image;
tumor treatment;
coordination;
magnetofluid;
reduction in situ;
superparamagnetic;
28.
Effect of Surface Termination on Electronic Structure of Nano-Crystalline Diamond Film
机译:
表面终端对纳米结晶金刚石膜电子结构的影响
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
Raman spectra;
X-ray photoelectron spectra;
boiling;
boron;
diamond;
doping;
energy gap;
nanostructured materials;
scanning electron microscopy;
scanning probe microscopy;
surface states;
surface structure;
surface treatment;
valence bands;
C:B;
I-V curves;
Raman spectroscopy;
SEM analysis;
SPM analysis;
X-ray photoelectron spectroscopy;
XPS analysis;
band gap;
diamond film;
electrical conductivity;
hydrogen-plasma treatment;
hydrogenation;
nanocrystals;
oxygenation;
surface termination;
valence band spectra;
electronic structure;
nano-crystal;
29.
Design and Fabrication of a Silicon-based Direct Methanol Fuel Cell
机译:
硅基直甲醇燃料电池的设计和制造
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
direct methanol fuel cells;
microchannel flow;
micromechanical devices;
silicon;
MEMS technology;
anodic microchannels;
asymmetric grid;
asymmetric mesh;
direct methanol fuel cell;
flow field;
silicon wafer;
MEMS;
micro direct methanol fuel;
spiral;
30.
Fabrication of Three Dimensional Micro Devices by Means of Two Photon Photopolymerization
机译:
通过两种光子光聚合制备三维微器件
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
microassembling;
micromechanical devices;
nanotechnology;
photochemistry;
polymerisation;
two-photon processes;
diffraction limit;
microfabrication;
nanostructure fabrication;
two-photon photopolymerization;
ultra short laser technology;
femtosecond laser;
photonic crystals;
photopolymerization;
31.
Experimental and Numerical Investigation of Micromachining by Laser-induced Electrochemical Process
机译:
激光诱导电化学工艺微机械加工的实验性和数值研究
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
electrical discharge machining;
electrochemical machining;
electrodeposition;
laser beam etching;
micromachining;
photothermal effects;
semiconductor lasers;
stainless steel;
62.5 micron;
808 nm;
etching quality;
etching velocity;
laser electrochemical etching;
laser enhanced photothermal effect;
laser heating;
laser induced electrochemical etching;
laser scanning;
metal-liquid interfaces;
minimum figure linewidth;
semiconductor laser;
sodium nitrate solution;
stainless steel patterning;
transverse etching;
electrochemical;
etching;
laser;
thermalphenomenal;
32.
A Microfluidic Chip Utilizing Controllable Moving Walls for the Formation of Micro-droplets in Liquids
机译:
利用可控移动壁的微流体芯片用于在液体中形成微液滴
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
drops;
emulsions;
microfluidics;
emulsification;
hydrodynamic focusing;
liquid-chopping;
micro-droplets;
microfluidic chip;
moving walls;
sheath flows;
MEMS;
hydrodynamic flow focusing;
moving wall;
33.
SNP Genotyping by Gel-immobilized ssDNA and Biolumometric Assay Coupled with Allele-specific Primer Extension Reaction
机译:
通过凝胶固定化的SSDNA和生物测量测定与等位基因特异性引物延伸反应的SNP基因分型
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
biological specimen preparation;
gels;
genetic engineering;
molecular biophysics;
organic compounds;
DNA analysis applications;
PCR products;
PPi conversion;
SNP genotyping;
SNP type identification;
acrylamide monomer;
allele specific primer extension reaction;
biolumometric assay;
copolymerisation;
electrophoresis;
gel immobilized ssDNA;
gel-immobilization method;
luciferase reactions;
polymerase extension;
pyrophosphate;
pyrosequencing;
single nucleotide polymorphisms;
single stranded DNA;
ssDNA template preparation;
acrylamide-modified nucleic acids;
allele-specific extension;
gel-immobilization;
single-nucleotide polymorphism;
34.
Buried Mask Revelation in Silicon Dioxide for Double Gate MOS Fabrication
机译:
双栅极MOS制作的二氧化硅中的埋地面罩启示
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
MIS devices;
buried layers;
etching;
masks;
silicon compounds;
silicon-on-insulator;
SOI wafer BOX;
SiOlt;
subgt;
2lt;
/subgt;
VHF etching parameters;
VHF oxide etching mechanism;
active silicon film;
buried mask revelation;
buried oxide;
etching temperature;
etching time;
metal oxide semiconductor;
selective implanted oxide etching;
self aligned double gate MOS fabrication;
silicon dioxide;
thermal oxide layer;
35.
Kinetics of Solid Phase Epitaxy of Amorphous Si Induced by Self-ion Implantation into Si with Nanocavities
机译:
用纳米覆盖物诱导的自晶Si固相外延的固相外延动力学
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
amorphous semiconductors;
dangling bonds;
elemental semiconductors;
ion implantation;
semiconductor growth;
silicon;
solid phase epitaxial growth;
SPEG sensitivity;
Si;
amorphous silicon solid phase epitaxy;
amorphous silicon structural changes;
nanocavities;
nanovoid dissociation;
nanovoided crystalline silicon;
regrowth activation energy;
regrowth atom attempt frequency;
regrowth kinetics;
self ion implantation;
solid phase epitaxial regrowth;
solid phase epitaxy kinetics;
structurally modified amorphous silicon;
crystalline silicon;
less dense amorphous silicon;
self-ion implantation;
36.
Study on Micro-machining by Micro-WEDM
机译:
微型WEDM微加工研究
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
electrical discharge machining;
hardness;
micromachining;
surface roughness;
Micro-WEDM technique;
micro bearing bracket;
micro gear die;
micro gears;
micro plastic forming;
micro shaped holes;
micro slot;
micro wire electrical discharge machining;
Micro-WEDM;
micro gear;
micro part;
37.
Simulation and Analysis of Dynamic Biomolecule Identification Technique Based on Molecular Motors and GMR Effect
机译:
基于分子电机和GMR效应的动态生物分子识别技术仿真与分析
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
biochemistry;
giant magnetoresistance;
magnetic particles;
magnetoresistive devices;
molecular biophysics;
nanoparticles;
sensors;
ATP molecular motors;
ATP synthase;
GMR effect;
GMR sensor;
dynamic biomolecule identification;
electrical resistance;
giant magnetoresistance effect;
magnetic nanoparticles;
rotary machine;
biomolecule identification;
inertia moment;
molecular motor;
38.
A Novel Low Cost MEMS Fiber-optic Variable Attenuator for WDM Applications
机译:
用于WDM应用的新型低成本MEMS光纤可变衰减器
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
electrostatic actuators;
etching;
light polarisation;
micromechanical devices;
optical attenuators;
wavelength division multiplexing;
MEMS fiber-optic variable attenuator;
WDM;
attenuation range;
bulk-silicon micromachining technology;
electrostatic comb-type actuator;
insertion loss;
polarization dependent loss;
return loss;
shutter;
single silicon wafer;
single-mode fibers;
twice boron-diffusion/etching process;
wavelength dependent loss;
wavelength division multiplexed;
MEMS;
VOA;
twice boron-diffusion/etching;
39.
Mechanical Design of Compliant Parallel Micromanipulators for Nano Scale Manipulation
机译:
兼容并联微操纵器的机械设计,用于纳米尺度操纵
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
micromanipulators;
nanopositioning;
compliant parallel micromanipulators;
nanotechnology;
compliant mechanisms;
nanomanipulation;
parallel manipulators;
40.
Integrated Sample Injection Chip for Micro-HPLC
机译:
微型HPLC的集成样品喷射芯片
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
chromatography;
microchannel flow;
microvalves;
MEMS;
high performance liquid chromatography;
liquid flow;
microchannels;
passive lowpass valve;
sample injection chip;
HPLC;
low pass valve;
microvalve;
passive valve;
sample injection;
41.
The Fabrication of Monolithic Micro Droplet Ejector using MEMS
机译:
使用MEMS的整体微液滴喷射器的制造
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
digital printing;
drops;
etching;
micromechanical devices;
nozzles;
MEMS;
PZT;
bending mode;
bending mode actuating membrane;
deep silicon etching technique;
digital printing system;
droplet size;
face-shooter;
monolithic micro-droplet ejector fabrication;
nozzle roundness;
nozzle straightness;
restrictor depth profile;
Micro ejector;
PZT actuator;
droplet;
inkjet;
42.
Optimized Surface Acoustic Wave-based Pressure Sensor Using Equivalent Circuit Model
机译:
基于表面声波的压力传感器使用等效电路模型
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
bending;
delay lines;
diaphragms;
equivalent circuits;
finite element analysis;
interdigital transducers;
pressure measurement;
pressure sensors;
stress-strain relations;
surface acoustic wave sensors;
surface acoustic waves;
440 MHz;
ECM;
FEM;
SAW device simulation;
acoustic aperture;
bond substrate;
broadband reflective delay line;
diaphragm bending distribution;
diaphragm stress-strain distribution;
dynamic peak separation;
equivalent circuit model;
finger pair number;
finite element method;
inter-digital transducer structure;
lithium niobate;
optimal design parameters;
optimized SAW-based pressure sensor;
reflection coefficient;
sensor configuration;
sensor geometry;
surface acoustic wave;
equivalent circuit models;
pressure sensor;
reflective delay line;
43.
Buckypaper's Fabrication and Application to Passive Vibration Control
机译:
Buckypaper的制造和应用于被动振动控制
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
carbon nanotubes;
finite element analysis;
mechanical properties;
nanotechnology;
scanning electron microscopy;
vibration control;
buckypaper fabrication;
electronic properties;
passive vibration control;
Buckypaper;
CVD synthesis;
carbon nanotube sheets;
44.
Capacity Evaluation of a MEMS Based Micro Cooling Device Using Liquid Metal as Coolant
机译:
用液态金属作为冷却剂的MEMS基微冷却装置的能力评价
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
coolants;
cooling;
liquid metals;
microfluidics;
3D heat transfer;
MEMS;
capacity evaluation;
coolant;
flow rate;
heat flux electronics;
liquid metal;
microcooling device;
chip cooling;
high heat flux;
numerical simulation;
45.
Finite Element Method Design and Fabrication of Thermo-sensitive Quartz Tuning Fork Resonators as Temperature Sensor
机译:
有限元方法设计和制造热敏石英调谐叉谐振器作为温度传感器
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
crystal resonators;
etching;
finite element analysis;
micromechanical resonators;
photolithography;
quartz;
temperature sensors;
vibrations;
90 Pa;
chemical etching;
finite element method;
piezoelectric resonators;
temperature sensor;
thermo-sensitivity;
tuning fork resonators;
piezoelectricresontors;
quartz crystal;
46.
Disposable Biosensor for Hemoglobin Determination in Whole Blood
机译:
全血血红蛋白测定的一次性生物传感器
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
amperometric sensors;
biosensors;
blood;
electrochemical analysis;
gold;
platinum;
potassium;
proteins;
60 s;
Au;
Pt;
amperometric detection technology;
athletes;
clinical diagnosis;
disposable biosensor;
erythrocytes;
hemoglobin concentration;
hemoglobin determination;
homecare application;
homemade portable meter;
patients;
platinized thin film gold electrode;
potassium ferricyanide;
saponin hemolysis;
whole blood;
hemoglobin;
portable meter;
47.
Development of A Haptic User Interface for Surface Sensing and Nanomanipulation Based on Atomic Force Microscope
机译:
基于原子力显微镜的表面传感和纳米尺寸的触觉用户界面的开发
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
atomic force microscopy;
haptic interfaces;
atomic force microscope;
haptic user interface;
nanomanipulation;
subnanometer resolution;
surface sensing;
AFM;
Force Feedback;
48.
Characterization of Mechanical Properties of PZT Thin Film by Nanoindentation
机译:
纳米茚满的PZT薄膜力学性能的表征
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
indentation;
microactuators;
microsensors;
sol-gel processing;
thin films;
PZT thin film;
Pb(ZrTi)Olt;
subgt;
3lt;
/subgt;
annealing time;
elastic modulus;
lead zirconate titanate thin films;
mechanical properties;
nanoindentation;
sol-gel-deposited;
PZT;
49.
Numerical Studies of Curved-walled Micro Nozzle/Diffuser
机译:
弯曲微喷嘴/扩散器的数值研究
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
computational fluid dynamics;
diffusion;
flow;
nozzles;
CFD software;
Reynolds number;
curved-walled micro nozzle;
diffuser;
pressure loss coefficient;
valve-less micro-pumps;
Fluent;
Nozzle;
50.
Application of Atomic Force Microscopy on the Nanometer Scale Surface Roughness Measurement
机译:
原子力显微镜在纳米尺度表面粗糙度测量中的应用
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
atomic force microscopy;
stainless steel;
surface topography measurement;
3D AFM image;
Atomic Force Microscopy Institute of Particle Physics Chongqing University;
nanometer scale surface roughness measurement;
polished stainless steel surface;
real space;
software implementation;
AFM;
evaluator;
mathematical model;
nanometer scale;
surface roughness;
51.
3D MEMS Design Method via SolidWorks
机译:
3D通过SolidWorks设计方法
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
computational geometry;
electronic design automation;
finite element analysis;
micromechanical devices;
3D MEMS design;
3D geometric model;
SolidWorks;
application programming interface;
MEMS;
design;
mask;
process;
52.
A Thermopneumatic-Actuated Polydimethylsiloxane Microfluidic System
机译:
炎热气动驱动的聚二甲基硅氧烷微流体系统
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
indium compounds;
microfluidics;
micropumps;
microvalves;
organic compounds;
pneumatic actuators;
pneumatic systems;
tin compounds;
350 micron;
4 Hz;
400 mW;
ITO;
ITO heater;
InSnO;
PDMS;
cut-off flow power;
duty ratio;
flow rate;
indium tin oxide-coated glass;
micropump;
pumping rate;
switching function;
thermopneumatic-actuated polydimethylsiloxane microfluidic system;
microfluidic;
microvalve;
53.
Fabrication and Characterization of Probes for Combined SPM Techniques Based on PECVD
机译:
基于PECVD的组合SPM技术探头的制造与表征
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
microelectrodes;
near-field scanning optical microscopy;
photoelectrochemistry;
plasma CVD;
polymer films;
sputtering;
voltammetry (chemical analysis);
Au;
PECVD;
SiN;
combined SPM techniques;
cyclic voltammetry;
electrochemical properties;
low temperature plasma enhanced chemical vapor deposition;
optical fiber polymer coating;
photoelectrochemical microscopy;
radio frequency magnetron sputtering;
scanning electrochemical microscopy;
semiconductor thin film;
ultramicroelectrodes;
Silicon nitride thin films;
54.
Investigation of Nanometer XY Positioning Stage
机译:
纳米XY定位阶段的研究
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
diffraction gratings;
finite element analysis;
interferometers;
nanopositioning;
Abbe's error;
coplanar structure design;
cumulative error;
guide planes;
impacted force;
linear diffraction grating interferometer;
low thermal expansion material;
measuring repeatability;
nanometer XY positioning stage;
straightness;
structure distortion;
thermal shift;
ultrasonic actuator;
coplanar concept;
distortion;
repeatability;
55.
Fabrication of Hexagonal-Prism Microstructure using Monolithic Etching Process
机译:
单片蚀刻工艺的六角形微观结构的制造
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
etching;
micromechanical devices;
polymers;
potassium compounds;
silicon;
3D hexagonal-like fillister structures;
80 micron;
KOH;
PDMS;
biochemical applications;
heat-exchanging applications;
hexagonal-prism microstructure;
microelectromechanical systems;
monolithic etching process;
optical applications;
photomask;
polydimethylsiloxane;
precise bulk etching;
silicon wafer;
lt;
110gt;
wafer;
Bulk etching;
Hexagonal-like structure;
MEMS;
56.
Optics Correction Based on MOEMS and PDS
机译:
基于MoEMS和PDS的光学校正
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
micro-optomechanical devices;
optical windows;
piezo-optical effects;
ray tracing;
refractive index;
speckle;
thermo-optical effects;
MEMS;
MOEMS technique;
PDS technique;
aero-optical effect;
blurring;
elasto-optical effect;
micro-opto-electro-mechanical system technique;
optical window;
optics correction;
phase diversity speckle technique;
thermal-optical effect;
IR window;
MOEMS;
PDS;
optical correction;
57.
Research on the Dynamics and Bistable State of a MEMS Variable Capacitor
机译:
MEMS可变电容器的动态和双稳态状态研究
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
capacitors;
iterative methods;
micromechanical devices;
MEMS two-parallel-plate variable capacitor;
MEMS variable capacitor bistable state;
MEMS variable capacitor dynamics;
iterative method;
overdamping state;
pull-in state;
squeeze film damping;
structural parameters;
suspended plate displacements;
suspended plate resultant forces;
suspended plate states;
underdamping state;
variable capacitor tuning range;
MEMS variable capacitor;
bistable state;
dynamics;
tuning range;
58.
The hydrophobicity of surfaces with micro-structures
机译:
微结构表面的疏水性
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
botany;
contact angle;
scanning electron microscopy;
wetting;
SEM;
hydrophobicity;
lotus leaves;
microstructures;
polydimethylsiloxane;
scanning electron microscope;
(super) hydrophobicity;
Lotus leaf;
PDMS;
micro-/nano-structure;
59.
Approach of Decreasing Effect of Temperature on Positioning Accuracy of Ultra-precision Micro-feed System
机译:
超精密微馈系统定位精度降低效应的方法
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
compensation;
light interferometry;
piezoelectric actuators;
position control;
temperature control;
temperature measurement;
interferometer measurement;
piezoelectric actuator;
temperature compensation;
temperature control system;
temperature drift;
ultra-precision flexure-hinge guided micro-feed system;
micro-feed stage;
piezoelectric acuator;
temperature;
60.
A New-Style Compositive Miniature Spectrum Instrument
机译:
一种新型综合微型谱仪
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
MIM devices;
aluminium;
integrated circuits;
interference spectrometers;
micro-optics;
micromechanical devices;
silicon;
silicon compounds;
silver;
14 nm;
39 nm;
Fabry-Perot antrum;
IC technology;
Si-Al-SiOlt;
subgt;
2lt;
/subgt;
-Ag;
aluminum film-silicon dioxide layer-silver film;
compositive miniature spectrum instrument;
integrated circuit;
microspectrometer;
miniature grating spectrum instrument;
silicon substrate;
silicon-metal film-silicon dioxide layer-metal film;
compositive;
instrument;
miniature;
spectrum;
61.
Influence of Magnetic Field on Carbon Nano-materials Produced in Liquid Arc
机译:
磁场对液体弧中产生的碳纳米材料的影响
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
arcs (electric);
carbon;
magnetic field effects;
nanostructured materials;
nanotechnology;
transmission electron microscopy;
C;
arc plasma;
carbon nanomaterials;
cross magnetic field;
high-resolution transmission electron microscopy;
liquid arc discharge;
liquid nitrogen;
arc;
carbon nano-materials;
liquid;
magnetic field;
62.
Experimental Study of Tribological Properties of Silicon-Based MEMS/NEMS Surface with Atomic Force Microscope
机译:
用原子力显微镜对硅基MEMS / NEMS表面的摩擦学特性的实验研究
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
atomic force microscopy;
micromechanical devices;
silicon compounds;
surface roughness;
tribology;
MEMS surface;
NEMS surface;
Si;
Si(100) substrate;
Si(OH)lt;
subgt;
4lt;
/subgt;
adhesion;
atomic force microscope;
microtribological properties;
octadecyltrichlorosilane molecular lubricant film;
silicon-based component;
tribo-chemical reaction;
AFM;
Experimental study;
Friction and wear;
MEMS/NEMS;
Theoretical analysis;
63.
Tens Femtogram Resoluble Piezoresistive Cantilever Sensors with Optimized High-Mode Resonance Excitation
机译:
提高船舶分离的压阻式悬臂传感器,具有优化的高模谐振励磁
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
Q-factor;
bioMEMS;
biosensors;
cantilevers;
chemical sensors;
microsensors;
piezoresistive devices;
bio/chemical molecular detection;
electromagnetic excitation;
high-mode flexure resonance;
microelectromechanical devices;
quality factor;
resonant sensor;
tens femtogram resoluble piezoresistive cantilever sensors;
ultrasensitive mass sensor;
Piezoresistors;
Resonance;
64.
A Compliant Ultra-Precision 6-DOF Parallel Positioner Based on the Coarse/Fine Dual Architecture
机译:
基于粗/精细双架构的符合符合的超精密6-DOF并联定位器
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
actuators;
compliance control;
fasteners;
flexible structures;
piezoceramics;
piezoelectric motors;
position control;
precision engineering;
MEMS performance;
coarse actuators;
coarse-fine dual architecture;
compliant mechanisms;
compliant passive joints;
control strategy based;
control system configuration;
elementary type parallel mechanisms;
fine actuators;
flexure hinges;
micro-electromechanical system performance;
optical stage performance;
piezoelectric ceramics;
precision engineering field;
precision performance tests;
stiffness assembly method;
ultraprecision parallel positioner;
compliant hinges;
kinematics analysis;
parallel mechanisms;
precision positioning;
65.
Uncertainties in the Micro/nano-Particles Induced Hyperthermia Treatment on Tumor Subject to External EM Field
机译:
微/纳米粒子的不确定性诱导肿瘤治疗外部EM场的肿瘤治疗
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
biological effects of fields;
heat transfer;
hyperthermia;
magnetic particles;
nanoparticles;
radiation therapy;
tumours;
3D quasi-steady state electromagnetic field;
bioheat transfer;
biological tissues;
external EM field;
hyperthermia treatment;
magnetic microparticles;
magnetic nanoparticles;
thermal ablation;
tissue temperature;
transient temperature response;
tumor;
magnetic micro/nano particle;
treatment planning;
tumor hyperthermia;
uncertainty analysis;
66.
Experimental Study of Flow Characteristics of Distilled Water under Pressure Driven in Microchannel
机译:
微通道驱动压力下蒸馏水流动特性的实验研究
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
microchannel flow;
quartz;
slip;
water;
13 micron;
20 micron;
40 to 100 mm;
Hlt;
subgt;
2lt;
/subgt;
O;
MEMS;
boundary slip;
channel walls;
distilled water;
flow characteristics;
flow rates;
microchannel pressure;
microdevices;
microelectromechanical system;
microflow systems;
round quartz microchannels;
Microchannel;
67.
Research on Permanent Magnet linear Synchronous Motors Driver for Micro-fabrication
机译:
微制造永磁线性同步电动机驱动器的研究
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
Fourier series;
Lyapunov methods;
finite element analysis;
linear synchronous motors;
micromotors;
micropositioning;
permanent magnet motors;
Fourier series nonlinear regress;
controller stability;
finite element method;
lyapunov function;
microfabrication;
normal force;
permanent magnet linear synchronous motor;
position sensor;
side force;
slot force;
thrust ripple;
PMLSM;
nonlinear position controller;
piecewise linear interpolation;
68.
A Novel Model for Surface Evolvement and Footing Effect Simulations in DRIE Fabrications
机译:
DRIE造物中的表面演化和基于效应模拟的一种新型模型
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
micromechanical devices;
plasma sheaths;
sputter etching;
2D string algorithm;
ICP DRIE fabrication;
MEMS fabrication;
NEMS fabrication;
advanced plasma sheath approximation;
deep reactive ion etching;
footing effect simulation;
inductively coupled plasma etching;
surface evolvement;
time multiplexed deep etching;
DRIE;
footing effect;
model;
69.
Study on Micro Electrochemical Machining at Micro to Meso-scale
机译:
微型电化学加工在微米尺度下的研究
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
electrochemical machining;
micromachining;
anode;
anodic dissolution process;
closed loop control system;
edge-cut electrode;
high-frequency micro-energy pulse power supply;
high-frequency short-pulse current;
machining gap;
machining voltage;
metal;
micro array square column;
micro electrochemical machining;
micro spiral beam;
micro-EC milling;
micro-ECM;
micro-hole;
microstructure;
passivating electrolyte;
stainless steel;
gap control;
pulsed curren;
70.
The Molecular Dynamics Simulation of Monocrystal Carbon, Silicon and Germanium Thermal Conductivity
机译:
单晶碳,硅和锗热导率的分子动力学模拟
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
carbon;
elemental semiconductors;
germanium;
molecular dynamics method;
nanoelectronics;
semiconductor thin films;
silicon;
thermal conductivity;
C;
Ge;
Si;
Tersoff potential energy function;
bulk crystals;
molecular dynamics simulation;
monocrystal carbon;
nanometer thin film;
nanoscale films;
nonequilibrium molecular dynamics;
size effect;
thin film thickness;
molecular dynamics;
71.
Reduction of the fcc to L10 Ordering Temperature for FePt Nanoparticles Containing Cu
机译:
将FCC降低到L10含Cu的纳米粒子的排序温度
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
annealing;
coercive force;
copper alloys;
iron alloys;
lattice constants;
nanoparticles;
organic compounds;
phase transformations;
platinum alloys;
reduction (chemical);
(FePt)lt;
subgt;
96lt;
/subgt;
Cult;
subgt;
4lt;
/subgt;
1;
2-hexadecanediol;
30 min;
400 C;
450 C;
500 C;
chemical reduction;
coercivity;
copper acetylacetonate;
disorderd crystal structure;
iron acetylacetonate;
iron alloy nanoparticles;
lattice parameter;
ordering temperature;
platiunum acetylacetonate;
Exchange Coupling;
FePtCu alloy;
Ordering;
fct structure;
72.
Two-Phase Flow in Microchannel Heat Sink with Nearly Uniform Heat Flux Boundary Condition
机译:
微通道散热器中的两相流,热通量边界条件几乎均匀
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
convection;
flow visualisation;
microchannel flow;
two-phase flow;
convective boiling;
liquid-vapor interface region;
microchannel heat sink;
nearly uniform heat flux boundary condition;
pressure fluctuation;
pressure microsensor;
temperature fluctuation;
temperature microsensor;
thermal microsystem;
boundary condition;
forced convection;
heat sink;
microchannel;
73.
A Bulk Micromachined Distributed Digital Microwave Phase Shifter with Butterfly Multilayer Bridges and MAM Capacitors
机译:
具有蝶形多层桥梁和MAM电容器的散装微机械分布式数字微波相移器
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
MIM devices;
boron;
bridge circuits;
capacitors;
delay circuits;
finite element analysis;
micromachining;
microwave phase shifters;
multilayers;
silicon;
1-bit phase shift;
MAM capacitors;
SCS mechanical property;
Si;
Si:B;
biasing network;
boron doped single crystal silicon skeleton layer;
butterfly multilayer loading microbridges;
device performance;
device reliability;
distributed digital microwave phase shifter;
finite element method full wave simulation;
high temperature reliability;
metal-air-metal capacitors;
microwave performance validation;
phase shifter microwave performance analysis;
return loss;
thermal mismatch;
true time delay performance;
bulk micromachining;
metal-air-metal (MAM) capacitor;
microbridge;
phase shifter;
radio frequency micro electromechanical system (RF MEMS);
74.
A CMOS Biochip for Electrical Detection of DNA with an Embedded Current Amplifier Circuit
机译:
具有嵌入式电流放大器电路的DNA电气检测CMOS Biochip
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
CMOS integrated circuits;
DNA;
amplifiers;
biomolecular electronics;
biosensors;
electrodes;
gold;
monolayers;
nanoparticles;
self-assembly;
0.35 micron;
Au;
CMOS biochip;
CMOS process;
DNA detection;
Volt-ohm-Milliammeter;
electric current;
electrical detection;
embedded current amplifier circuit;
monolayer AuNP;
multilayer AuNP;
post-CMOS micromachining process;
probe oligonucleotide strand;
self-assembly multilayer gold nanoparticles;
self-assembly process;
suspended gold nanoparticles;
target oligonucleotide strand;
thiol-modified end;
CMOS;
biochip;
current amplifier;
75.
A Novel Fabrication Approach for Microneedles Using Silicon Micromaching Technology
机译:
一种使用硅微观技术的微针的新颖制造方法
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
biomedical materials;
drug delivery systems;
electroplating;
etching;
micromachining;
needles;
nickel;
potassium compounds;
silicon;
150 to 200 micron;
300 micron;
KOH;
Ni;
drug delivery optimization;
etching rate;
metallic needles;
nickel electroplating;
novel microneedle fabrication;
painless microneedles;
polishing;
potassium hydroxide etching;
silicon micromaching technology;
silicon microneedle molds;
tapered hollow metallic needle array;
microfabrication;
microneedle;
76.
The Novel Fabrication Method and Optimum Tooling Design Used for Microlens Arrays
机译:
用于微透镜阵列的新型制造方法和最佳工具设计
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
design of experiments;
electroforming;
embossing;
lithography;
mass production;
microlenses;
moulding;
optical arrays;
replica techniques;
surface roughness;
150 C;
150 micron;
31.51 micron;
5.21 MPa;
70 C;
90 s;
Llt;
subgt;
9lt;
/subgt;
experimental matrix design;
Taguchi method;
imprint lithography;
metal mold;
microhot embossing;
microlens arrays;
novel fabrication method;
optimum tooling design;
processing temperature;
replication;
sag height;
statistical analysis;
thermal reflow;
Micrlens array;
Micro hot embossing molding;
77.
Monolithic MEMS SoC Design and Fabrication Using 0.35 ??m BCD Technology
机译:
单片MEMS SOC设计和制造使用0.35?M BCD技术
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
BIMOS integrated circuits;
bipolar integrated circuits;
etching;
micromechanical devices;
system-on-chip;
0.35 micron;
60 V;
BCD technology;
BOE etching;
Bipolar/CMOS/DMOS 4 metal;
MEMS fabrication;
array-type structure designs;
monolithic MEMS SoC design;
sensing circuit;
Bipolar/CMOS/DMOS;
MEMS;
SoC;
monolithic;
78.
Disposable Smart Immunosensing Biochip Using a Novel Electrochemical signaling Method
机译:
使用新型电化学信号传导方法的一次性智能免疫抑制生物芯片
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
bioMEMS;
biosensors;
capillarity;
electrochemical electrodes;
electrochemical sensors;
electrochemistry;
enzymes;
microfluidics;
patient diagnosis;
polymers;
20 mm;
25 mm;
6 mm;
DNP antigen functionalized electrode;
PDMS layers;
activated enzyme;
antiDNP antibody;
biocatalytic enzyme back filling immobilization;
biorecognition reaction;
capillary attraction force;
dendrimer layer;
device fluid flow;
dinitrophenyl;
electrochemical signal amplification;
electrochemical signaling method;
enzymatic catalysis;
fluid transport mechanism;
glass substrate;
glucose oxidase;
immunoelectrodes;
immunosensing surface construction;
ligand functionalization;
periodate-treated GOX;
poly-dimethylsiloxane;
polyamidoamine G4-dendrimer;
portable clinical diagnostics;
portable lab-on-a-chip applications;
smart immunosensing biochip;
PDMS;
back-filling;
immunosensing;
79.
Deviations of Electroosmotic Fluidic Profile from Electric Double Layer Theory
机译:
电软渗流体轮廓与电双层理论的偏差
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
electrochemistry;
electrokinetic effects;
microchannel flow;
osmosis;
Debye length;
electric double layer theory;
electroosmotic flow;
electroosmotic fluidic profile;
microchannels;
microfluidic devices;
zeta potential;
Electric Double Layer;
Electroosmotic;
Microchannel;
Microfluidic;
80.
A Molecular Dynamics Study of Thermal Ablation
机译:
热烧蚀的分子动力学研究
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
biological tissues;
biothermics;
heat transfer;
molecular biophysics;
molecular dynamics method;
proteins;
thermal conductivity;
GROMACS protein data bank;
Green-Kubo formalism;
alanine;
autocorrelation function;
bioheat transfer;
biotissue;
molecular dynamics study;
thermal ablation;
MD;
bio-heat;
81.
Novel Semiconductor Nanodevices for Detections of THz Signals
机译:
用于检测THz信号的新半导体纳米型
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
microwave diodes;
nanolithography;
signal detection;
submillimetre wave detectors;
THz signal detections;
broken geometric symmetry;
nanodiodes;
parasitic capacitance;
self-switching device;
semiconductor nanodevices;
Nanotechnology;
Submillimeter wave diodes;
Submillimeter wave measurements;
82.
Advanced Fabrication of Single Wall Carbon Nanotubes by Laser Ablation with Reduced Number of Parameters
机译:
通过减少参数的激光消融先进的单壁碳纳米管制造
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
carbon nanotubes;
graphite;
laser ablation;
materials preparation;
C;
Nd:YAG laser ablation;
SWNT advanced fabrication;
graphite-bimetallic catalyst composite target;
improved SWNT growth;
processing parameters;
single wall carbon nanotubes;
carrying gas flow;
room temperature;
single wall carbon nanotube;
83.
An Inline Type Microwave Power Sensor Using GaAs MMIC Process
机译:
使用Gaas MMIC过程的内联型微波功率传感器
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
III-V semiconductors;
MMIC;
coplanar waveguides;
gallium arsenide;
microsensors;
microwave detectors;
CPW line;
GaAs;
MEMS membrane;
MMIC process;
microwave power sensor;
GaAs MMIC process;
MEMS technology;
inline type;
power sensor;
84.
Hybrid Computations Using Continuum and Molecular Dynamics for Micro-fluidics
机译:
使用连续体和微液的分子动力学的混合计算
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
Couette flow;
Navier-Stokes equations;
continuum mechanics;
flow simulation;
hybrid simulation;
microfluidics;
molecular dynamics method;
Langevin equation;
constrained particle dynamics;
hybrid computations;
hybrid numerical method;
molecular dynamics;
no-slip boundary conditions;
particle-continuum dynamics;
sudden-start Couette flows;
Langevin;
continuum;
hybrid;
85.
Electrospun Nanofibers Bundles
机译:
Electromun纳米纤维捆绑
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
nanostructured materials;
polymer fibres;
polymer solutions;
3 sec;
bias voltage;
electrodes;
electrospinning;
nanofiber bundles;
polymer solution;
Density;
Nanofibers bundles;
Non-uniform electrical field;
86.
Nonafiber Membrane of EVOH-Based Ionomer by Electrospinning
机译:
EVOH基离聚物的非纤维膜通过静电纺丝
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
melt spinning;
membranes;
polymer solutions;
scanning electron microscopy;
surface tension;
EVOH-based ionomer;
comb ionomer;
electrospinning;
electrospun;
nanofiber membrane;
nonwoven membranes;
poly(ethylene covinyl alcohol);
polymer jet;
polymer solution;
sulfonic acid;
EVOH-g-SO3H;
SEM;
morphology;
87.
Cantilever-based Transducer for Molecules Configuration Research
机译:
基于悬臂的传感器,用于分子配置研究
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
cantilevers;
chemical sensors;
light reflection;
microsensors;
molecular configurations;
PNIPAM molecules;
biological sensor;
cantilever-based transducer;
chemical sensor;
microcantilever;
microcantilever-based optical detection;
molecular conformational change;
molecules configuration research;
surface stress changes;
temperature change;
surface stress;
transducer;
88.
A Novel Minimally Invasive Method to Detect Glucose Concentration without Blood Extraction
机译:
一种新的微创方法,以检测没有血液提取的葡萄糖浓度
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
biological effects of acoustic radiation;
chemical analysis;
chemical variables measurement;
microfluidics;
patient diagnosis;
patient monitoring;
refractive index;
sugar;
surface plasmon resonance;
blood glucose monitoring;
diabetics;
in vitro blood glucose concentration measurement;
low frequency ultrasound;
microfluidic platform;
microsystem technology;
miniature diabetes monitoring device;
minimally invasive method;
skin permeability enhancement;
stratum corneum lipid bilayers;
surface plasma resonance detecting;
surface plasma resonance sensor;
ultrasonic interstitial fluid transdermal extraction;
vacuum extraction;
glucose concentration;
interstitial fluid;
low-frequency ultrasound;
surface plasma resonance;
vacuum extration;
89.
A Closed Form Solution for the Pull-in Voltage of the Micro Bridge with Initial Stress subjected to Electrostatic Loads
机译:
用于微桥的拉伸电压的闭合形式解决方案,其初始应力经受静电负载
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
electrostatic actuators;
microsensors;
Euler beam theory;
electrostatic load;
energy method;
fringing filed effect;
initial stress;
mechanical characterization;
microbridge;
microdevice design;
pull-in voltage;
Electrostatic;
MEMS;
90.
An Intelligent High-Speed 3D Data Registration Integrated Circuit Applied to Large Array Format Inkjet Printhead
机译:
智能高速3D数据登记集成电路应用于大型阵列格式喷墨打印头
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
ink jet printers;
integrated circuit design;
micromechanical devices;
nozzles;
0.35 micron;
3D data registration scheme;
CMOS 0.35 mum process;
IC architecture;
data management;
data registration integrated circuit;
droplet ejection;
gating transistor;
ink firing resistor;
large array format inkjet printhead;
multiplexer data latches;
printing speed;
shift registers;
ASIC 3D architecture;
Inkjet/Printhead;
91.
Electrostatically Actuated Nano Tweezers Fabricated on Micro Processed Electrodes
机译:
在微处理电极上制造的耐静电纳米镊子
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
carbon;
chemical vapour deposition;
electrostatic actuators;
focused ion beam technology;
microelectrodes;
micromanipulators;
nanostructured materials;
silicon-on-insulator;
sputter etching;
102 V;
17 micron;
19.6 micron;
2.21 micron;
3.4 micron;
3.5 micron;
30 V;
300 nm;
6.9 micron;
93 V;
C;
FIB-CVD;
MEMS electrodes;
SOI wafer;
Young modulus;
bent type tweezers;
carbon tweezers;
deep reactive ion etching;
electrostatic actuation;
electrostatic tweezing action;
electrostatically actuated nanotweezers;
focused ion beam;
interconnecting platform;
localized chemical vapor deposition;
microelectromechanical system;
microprocessed electrodes;
nanoscale device;
nanoscale tweezers;
snap-down threshold voltages;
straight type tweezers;
Electrostatic force;
Nano manipulation;
Nanotweezer;
Young's modulus;
component;
92.
High-Aspect Ratio Metallic Nano Grippers
机译:
高纵横比金属纳米夹具
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
electron beam lithography;
electroplating;
finite element analysis;
grippers;
micromanipulators;
fabrication;
metallic nanogrippers;
nanomanipulator;
polymethyl methacrylate resist;
submicron metallic electrothermal gripper;
93.
Platinum Black Electroplated Impedance Particle Sensor
机译:
铂黑电镀阻抗粒子传感器
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
electric impedance measurement;
electrochemical electrodes;
microsensors;
platinum;
electrolyte interface impedance;
electroplated impedance particle sensor;
impedance spectra measurement;
integrated parylene technology;
microelectrical impedance particle sensor;
platinum black;
polystyrene beads;
sensing electrodes;
electroplating;
impedance;
particle;
paryleen;
94.
A RFID Tag Based Remote DNA sensing System
机译:
基于RFID标签的远程DNA传感系统
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
DNA;
biosensors;
lab-on-a-chip;
radiofrequency identification;
AuNP linked structures;
DNA chip assay;
LC resonant frequency shift;
RFID communication platform;
biochemical detection;
capture DNA immobilization;
gold nanoparticles;
immunological amplification method;
medium permittivity;
microcapacitor gaps;
probe DNA;
radiofrequency identification system;
rapid DNA sequence detection;
remote DNA sensing system;
series LC circuit resonant frequency;
target DNA;
RFID;
diagnostic detection;
self-assembly;
95.
Residual Stresses Measuring of Electrostatic MEM switches by Piezoelectric Layers
机译:
压电层静电MEM开关的残余应力测量
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
coating techniques;
electrostatic devices;
internal stresses;
microswitches;
piezoelectric thin films;
stress measurement;
MEMS structure functionality;
applied voltage calculation;
deposition process residual stresses;
electrostatic MEM switches;
micro-electromechanical systems;
piezoelectric layers;
residual stresses measurement;
surface micromachining;
thin film material properties;
MEM switches;
Piezoelectric;
Residual Stresses;
96.
In Situ Visual Investigation of CO2 Bubbles Clogging Phenomena in ??DMFC Anode Micro Flow Field
机译:
在DMFC阳极微流场中的CO2气泡堵塞现象的原位视觉研究
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
bubbles;
carbon compounds;
direct methanol fuel cells;
flow visualisation;
microchannel flow;
180 micron;
COlt;
subgt;
2lt;
/subgt;
clogging phenomena;
fuel current density;
fuel feeding rate;
liquid feed microdirect methanol fuel cells;
microfluidics test station;
muDMFC anode microflow field;
CO2 bubble;
clogging;
flow field;
??DMFC;
97.
Investigation and Improvement of high performance planar IGBT
机译:
高性能平面IGBT的调查与改进
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
electric potential;
insulated gate bipolar transistors;
power semiconductor devices;
conduction losses;
conductivity modulation;
device turn-off;
drift region;
high injection efficiency anode;
high performance planar IGBT;
improved buffer;
insulated gate bipolar transistor;
on-resistance;
on-state losses;
on-state voltage drop;
power electronics;
switching losses;
turn-off time;
weakly doped buffer region;
better trade-off;
novel buffer;
power device;
98.
Design MEMS Actuators with Topology Optimization Method
机译:
使用拓扑优化方法设计MEMS执行器
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
microactuators;
optimisation;
sensitivity analysis;
GCMMA;
MEMS actuators;
adjoint method;
globally convergent version of the method of moving asymptotes algorithm;
microelectromechanical systems;
multiobjective design;
topology optimization method;
MEMS actuator;
multi-objective design;
optimization algorithm;
topology optimization;
99.
Simulation of Flow and Heat Transfer in Micro Couette Flow
机译:
微沟流体流动和热传递模拟
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
Couette flow;
Knudsen flow;
Monte Carlo methods;
flow simulation;
heat transfer;
micromechanical devices;
Burnett equations;
Knudsen numbers;
MEMS systems;
NEMS systems;
direct simulation Monte Carlo method;
heat flux;
information preservation method;
microcouette flow;
nondimensional wall shear stress;
DSMC method;
IP method;
MEMS;
100.
Optimal Design of a New Nanopositioner using Genetic Algorithm
机译:
遗传算法新纳米定位器的最佳设计
会议名称:
《Institute of Electrical and Electronics Engineers International Conference on Nano/Micro Engineered and Molecular Systems》
|
2006年
关键词:
genetic algorithms;
nanopositioning;
flexure hinges;
genetic algorithm;
global dexterity index;
parallel manipulator;
parallel mechanisms;
parallel nanopositioner;
piezoelectric actuators;
pseudo-rigid-body model;
workspace size;
compliant mechanisms;
nanopositioner;
optimal design;
parallel manipulators;
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