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Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems

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1.Design of a fully automated assembly unit for integration of surface acoustic wave sensors into polymer housings for biomedical applications

机译：用于将表面声波传感器集成到生物医学应用中的聚合物壳体中的全自动组装单元的设计
- 作者：A. Gunther;B. E. Rapp
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
2.Array of Biomimetic Hair Sensor Dedicated for Flow Pattern Recognition

机译：用于流动模式识别的仿生毛发传感器阵列
- 作者：Ahmad Dagamseh;Christiaan Bruinink;Marcel Kolster;Remco Wiegerink;Theo Lammerink;Gijs Krijnen
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
3.Molecular Dynamics Simulation of Mechanical Properties of Gold Nanowire

机译：金纳米线力学性能的分子动力学模拟
- 作者：P. Nayebi;M. Shamshirsaz;E. Zaminpeyma
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
- Molecular Dynamics Simulation;
- Gold nanowires;
- Young modulus;
- Temperature dependency;
- Thermal expansion coefficient;
4.Fabrication and Characterization of MEMS-based Flow Sensors Based on Hot Films

机译：基于热膜的基于MEMS的流动传感器的制造与表征
- 作者：Rong-Hua Ma;Yu-Hsiang Wang;Yao-Wen Tsai;Chin-Lung Chang;Chia-Yen Lee
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
5.Photonic Micromachined Tunable Lasers

机译：光子微机械可调谐激光器
- 作者：A. Q. Liu
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
- MEMS;
- Tunable laser;
- Photonics;
6.Microfabrication and Testing of Dye-Sensitized-Solar-Cells Employing Atomic-Layer-Deposition

机译：使用原子层沉积的染料敏化太阳能电池的微制造和测试
- 作者：Renan Moreira;David Elam;Ramakrishna Kotha;Arturo Ayon
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
7.Multilayered Magneto-impedance microsensors for Non Destructive Control

机译：用于非破坏性控制的多层磁阻微传感器
- 作者：Johan MOULIN;Marion WOYTASIK;Iman SHAHOSSEINI;Francisco ALVES
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
8.Hermetic BSG thin film coatings for Harsh Environment Applications

机译：密封BSG薄膜涂层，用于苛刻环境应用
- 作者：S. Maus;U. Hansen;J. Leib;M. Toepper
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
9.Structure Modification of M-AFM Probe for the Measurement of Local Conductivity

机译：M-AFM探头测量局部电导率的结构改造
- 作者：A. Fujimoto;L. Zhang;A. Hosoi;Y. Ju
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
10.Atomic Layer Deposited (ALD) Zinc Oxide film characterization for NEMS and MEMS

机译：沉积原子层（ALD）NEMS和MEMS的氧化锌膜表征
- 作者：R. Kotha;D. Elam;G. Collins;N. Guven;A. Chabanov;C. L. Chen;A. A. Ayon
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
11.High-Sensitive Piezoelectrically-Transduced Silicon Disk Micro Resonator for On-Chip Human Healthcare

机译：用于片上人类医疗保健的高敏感压电转导的硅片微谐振器
- 作者：Jian Lu;Tadatoiiio Suga;Yi Zhang;Toshihiro Itoh;Ryutaro Maeda;Takashi Mihara
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
12.Fabrication of a Metal Protector for a Fiber Sensor using Through-Mask Electrochemical Micromachining with Pulse DC Power

机译：使用具有脉冲直流电力的通孔电化学微机械的光纤传感器的金属保护器的制造
- 作者：Wei-Hung Shih;Chih-To Wang;Hsun-Heng Tsai;Wei-Te Wu
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
13.The Study of Energy Storage and Temperature-Controlled for the Packaging Plate with Microencapsulated Phase Change Materials

机译：微胶囊化相变材料的包装板储能和温度控制研究
- 作者：Wei-Tzuo Lin;De-Shau Huang;Ming-Tzer Lin;Chi-Ming Lai
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
14.A comparative design study on in-pipe inspection micro robots using AHP method

机译：使用AHP方法对管道检查微机器人的比较设计研究
- 作者：Reza Nadafi;Fatemeh Edalatfar;Parisa Zomorodian;Saman Nazari Nejad;Mansour Kabganian;Farshad Barazandeh
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
- Microrobot;
- AHP;
- In-pipe moving mechanisms;
15.Value Added Packaging of Microsystems

机译：Microsystems的增值包装
- 作者：Erik Jung
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
16.Synthesis of Biochemical Applications on Digital Microfluidic Biochips with Operation Variability

机译：运行变异性数字微流体生物芯片生物化学应用的合成
- 作者：Mirela Alistar;Elena Maftei;Paul Pop;Jan Madsen
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
17.System-Level Modeling and Simulation of the Cell Culture Microfluidic Biochip ProCell

机译：细胞培养微流体Biochip Procell的系统级模拟和仿真
- 作者：Wajid Hassan Minhass;Paul Pop;Jan Madsen;Mette Hemmingsen;Martin Dufva
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
18.Influence of deposition temperature of ZnO thin films for self powered wearable fabrics using ALD

机译：ZnO薄膜沉积温度的影响使用ALD自动耐磨织物
- 作者：David Elam;Ramakrishna Kotha;Ross Hackworth;Arturo Ayon;Chonglin Chen;Andrey Chabanov
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
19.Nonlinear behaviour of a micromachined SOI device for energy harvesting application

机译：微机械加工应用的微机械SOI装置的非线性行为
- 作者：B. Ando;S. Baglio;N. Dumas;L. Latorre;P. Nouet;C. Trigona
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
20.Design of a Smart CMOS High-Voltage Driver for Electrostatic MEMS Switches

机译：用于静电MEMS开关的智能CMOS高压驱动器的设计
- 作者：Norbert Dumas;Laurent Latorre;Frederick Mailly;Pascal Nouet
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
- MEMS;
- CMOS;
- Electrostatic Switch;
- Diagnosis;
21.Fabrication of a Novel Microcantilever Probe with Inverted Pyramidal Microdischarge for Maskless Scanning Plasma Etching

机译：具有倒置金字塔微水池的新型微电机探头，用于无掩模扫描等离子体蚀刻
- 作者：Li Wen;Qiu-Ping Zhang;Wei-Wei Xiang;Hai Wang;Li-Wen He;Jia-Ru Chu
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
22.Low-Temperature Bonding for Microdevices

机译：用于微型微型的低温键合
- 作者：Ying-Hui WANG;Jian LU;Tadatomo SUGA
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
23.An Optimized Electronic Architecture for Resistive Sensors

机译：用于电阻传感器的优化电子架构
- 作者：Boris Alandry;El Mehdi Boujamaa;Souha Hacine;Laurent Latorre;Frederick Mailly;Pascal Nouet
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
24.Alternative Materials for RF MEMS Switches in III-V Technology

机译：III-V技术中RF MEMS开关的替代材料
- 作者：Anna Persano;Fabio Quaranta;Adriano Cola;Maria Concetta Martucci;Pasquale Creti;Antonietta Taurino;Pietro Siciliano;Romolo Marcelli;Giorgio De Angelis;Andrea Lucibello
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
- RF MEMS;
- Switches;
- III-V technology;
- TaN;
- Ta_2O_5;
25.Low Voltage Piezoelectricity Actuating Variable Focus Piano-Convex Liquid Lens Module Fabrication

机译：低压压电致动可变聚焦钢琴凸液透镜模块制造
- 作者：Hsiharng Yang;Jun-Kwei Huang;Yin-Fei Lin;Ruey Fang Shyu;Mau-Shuin Yeh
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
26.Thermally Compensated Intelligent Irradiation Sensor

机译：热补偿智能辐射传感器
- 作者：E. Bandy;A. Foldvary;M. Rencz
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
27.Normally closed piezoelectric micro valve

机译：常闭压电微阀
- 作者：Sandy Zaehringer;Markus Menacher;Paul Kirchner;Norbert Schwesinger
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
28.Wafer-Level Glass Capping with Optical Integration

机译：用光学集成晶圆级玻璃封盖
- 作者：U. Hansen;S. Maus;J. Leib;M. Toepper
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
29.Roll-to-Roll Hot Embossing of Microstructures

机译：微结构的卷 - 卷热压花
- 作者：Thomas Velten;Frank Bauerfeld;Herbert Schuck;Sabine Scherbaum;Christof Landesberger;Karlheinz Bock
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
30.Analysis and design of an all metal in line series ohmic RF MEMS switch for microwave applications

机译：用于微波应用线系列欧姆RF MEMS开关的全金属的分析与设计
- 作者：M. Spasos;N. Charalampidis;K. Tsiakmakis;R. Nilavalan
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
- All metal in line series ohmic RF MEMS switch;
- Hammerhead;
- Distributed actuation force;
31.Leak Detection Methods for Glass Capped and Polymer sealed MEMS Packages

机译：玻璃盖和聚合物密封MEMS封装的泄漏检测方法
- 作者：Suzanne Millar;Marc P.Y. Desmulliez;Stewart McCracken
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
32.Continuous nano/micro-machining and weaving integration process for fiber substrates

机译：连续纳米/微加工和编织纤维基材的整合方法
- 作者：Toshihiro Itoh;Seiichi Takamatsu;Takeshi Kobayashi;Nobuhisa Shibayama;Koji Miyake
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
- Large area electronics;
- Die-coating;
- Weaving;
- PEDOT:PSS;
- Pressure sensor;
33.An Approach for Systematic Behavioral Modeling of Micro Systems

机译：微系统系统行为建模的一种方法
- 作者：Peter Schneider;Sven Reitz;Gtinter Elst;Andreas Wilde
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
34.Identification of Dynamic Nonlinear Thermal Transfers for Precise Correction of Bias induced by Temperature Variations

机译：识别动态非线性热传输，以便精确校正温度变化诱导的偏差
- 作者：Celine Casenave;Gerard Montseny;Henri Camon;Francois Blard
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
35.Low-Frequency MEMS Energy Harvesters for the Supplying of Vehicle Diagnostic Systems

机译：低频MEMS能量收割机供提供车辆诊断系统
- 作者：Giorgio De Pasquale;Aurelio Soma
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
36.Study of a 3D MEMS-based tactile vibration sensor for the use in middle ear surgery

机译：用于中耳手术中使用的3D MEMS系触觉振动传感器的研究
- 作者：Yoann Arthaud;Libor Rufer;Salvador Mir
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
37.Alternative mould insert fabrication technology for micromoulding by galvanic replication

机译：替代模具插件通过电流复制微塑造制造技术
- 作者：M. Wissmann;M. Guttmann;M. Hartmann;A. Hofmann;B. Hummel
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
38.A Novel Chip-on-Glass method for Slim LCD Packaging

机译：一种用于SLIM LCD包装的新型芯片玻璃玻璃纤维方法
- 作者：Gou-Jen Wang;You-Hung Lin;Kang J. Chang
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
39.Energy Dissipation Associated with Material Damping on Vibrating MEMS Components

机译：振动MEMS组分对材料阻尼相关的能量耗散
- 作者：Giorgio De Pasquale;Timo Veijola;Aurelio Soma
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
40.Nanoindentation experiments with small tip radii: an experimental method

机译：小尖端半径的纳米凸缘实验：实验方法
- 作者：Mien Martegoutte;Cedric Seguineau;Christophe Malhaire;Thibaut Fourcade;Jean-Michel Desmarres;Xavier Lafontan;Pressecq Francis
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
41.A Dual Axis CMOS frontside bulk micromachined thermal accelerometer

机译：双轴CMOS前侧散装微机械热加速度计
- 作者：Alexandra Garraud;Alain Giani;Philippe Combette;Benoit Chariot;Mathieu Richard
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
- Accelerometer;
- Thermal;
- Convection;
- CMOS;
- MEMS;
42.Avian influenza surveillance system in poultry farms using wireless sensor network

机译：使用无线传感器网络家禽养殖场禽流感监测系统
- 作者：Hironao Okada;Koutarou Suzuki;Tsukamoto Kenji;Toshihiro Itoh
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
43.An Experimental Characterization of Au-, Ru-, Rh- and Ni- Based Microcontacts for MEMS

机译：对MEMS的AU-，RU - ，RH和NI的微接触的实验表征
- 作者：Adrien Broue;Jeremie Dhennin;Pierre-Louis Charvet;Frederic Courtade;Peter Heeb;Patrick Pons;Robert Plana
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
44.A piezoelectric energy harvester with a mechanical end stop on one side

机译：一个压电能量收割机，机械端部一侧停止
- 作者：Lars-Cyril Julin Blystad;Einar Halvorsen
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
45.Large Area Micro Roller Embossing Using Low Cost Flexible Mould Fabricated from Polymer-Metal Film

机译：使用低成本柔性模具制造的大面积微辊压花，由聚合物 - 金属膜制成
- 作者：Xuechuan SHAN;Y. C. SOH;L. JIN;C. W. LU
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
46.Design, Fabrication and Characterization of a Fully Programmable Micro Diffraction Grating

机译：完全可编程微衍射光栅的设计，制造和表征
- 作者：R. Lockhart;R. P. Stanley;M. Tormen
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
47.Simulation of a MEMS piezoelectric energy harvester

机译：模拟MEMS压电能量收割机
- 作者：Aliza Aini Md Ralib;Anis Nurashikin Nordin;Hanim Salleh
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
- Piezoelectric;
- Energy harvesting;
- Cantilever beam;
- Interdigitated electrodes;
48.Blind tracing of mechanical movement in electrostatic MEMS structures

机译：静电MEMS结构中机械运动的盲目追踪
- 作者：V. Szekely;P. G. Szabo
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
49.Fabrication of the Novel Multi-D-Shape Fiber Sensor by Femtosecond Laser Machining with the Diffractive Optical Element

机译：用衍射光学元件通过飞秒激光加工制造新型多D形光纤传感器
- 作者：Chien-Hsing Chen;Jaw-luen Tang;Wei-Te Wu
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
50.Simulations of Surface and Bulk Acoustic Wave MEMS Biosensors

机译：表面和散装声波MEMS生物传感器的模拟
- 作者：Nadira Jamil;Anis Nurashikin Nordin;Ioana Voiculescu;Maizirwan Mel
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
- Acoustic wave;
- Biosensor;
- Surface acoustic wave;
- Bulk acoustic wave;
- Resonator;
- Animal-cell;
- DF-1;
- COMSOL;
51.Replication of micro and sub-micro structures by means of hot embossed polymer inserts

机译：通过热压花聚合物插入物复制微型和亚微观结构
- 作者：Alexander Kolew;Karsten Sikora;Daniel Munch;Matthias Worgull
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
52.Advances in the design and test of a novel open ended microwave oven

机译：新型开放式微波炉的设计和测试进展
- 作者：Sumanth K. Pavuluri;Tim Tilford;George Goussetis;Marc P.Y. Desmulliez;Marju Ferenets;Raphael Adamietz;Frank Eicher;Chris Bailey
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
53.Single-Cell-Based Measurement of Supraphysiological Thermal Injury in Human Carcinoma Cells Utilizing a Micropatterned Hydrogel Chip

机译：利用微型水凝胶芯片的人癌细胞中致血管血管血管术中的单细胞基础测量
- 作者：Chun-Ping Jen;Ching-Te Huang;Cheng-Han Tsai
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
- Supraphysiological;
- Thermal injury;
- Micropattern;
- Hydrogel;
- Single cell;
54.Calculated Performance Characteristics of Micromachined Thermopiles in Wearable Devices

机译：可穿戴设备中微机械热处理的性能特性
- 作者：Vladimir Leonov;Jiale Su;Ruud J. M. Vullers
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
55.A New Design of rotational tuneable WideBand RF MEMS Capacitor

机译：旋转可调宽带RF MEMS电容的新设计
- 作者：J. Pagazani;P. Nicole;L. Rousseau;F. Marty;G. Lissorgues
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
- RF MEMS;
- Tuneable Capacitor;
- Rotational device;
- High Displacement;
56.Investigation of Parallel Heat-flow Path in Electrothermal Microsystems

机译：电热微系统中平行流动路径的研究
- 作者：Peter G. Szabo;Vladimir Szekely
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
57.Analysis of Shock-induced Polysilicon MEMS Failure: a Multi-scale Finite Element Approach

机译：震动诱导多晶硅MEMS故障分析：多尺度有限元方法
- 作者：S. Mariani;A. Ghisi;R. Martini;A. Corigliano;B. Simoni
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
58.Modeling Analysis of a Tri-Axial Microaccelerometer with Piezoelectric Thin-Film Sensing Using Energy Method

机译：用能量法用压电薄膜感测的三轴微区测量仪的建模分析
- 作者：Jyh-Cheng YU;Chungda Lee;Chiaokai Chang;Weinan Guo
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
59.Simple and Efficient Control of MEMS by Means of Operatorial Transformations

机译：通过操作转换简单有效地控制MEMS
- 作者：Emmanuel Montseny;Henri Camon
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
60.Modeling and Finite Element Analysis of Mechanical Behavior of Flexible MEMS Components

机译：柔性MEMS组件的力学行为建模与有限元分析
- 作者：Marius Pustan;Stephane Paquay;Veronique Rochus;Jean-Claude Golinval
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
61.Fabrication of Wireless Sensor Platform on Transparent Flexible Film Using Screen Printing and Via Interconnect

机译：使用丝网印刷和通过互连在透明柔性膜上的无线传感器平台的制造
- 作者：C. W. P. Shi;Xuechuan Shan;G. Tarapata;R. Jachhowicz;C. W. Lu;H. T. Hui
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
62.Design and Modeling of Stable, High Q-factor Curved Fabry-Perot cavities

机译：稳定，高Q系子弯曲法布里 - 珀罗腔的设计与建模
- 作者：Maurine Malak;Tarik Bourouina;Nicolas Pavy;Elodie Richalot;Frederic Marty;Ai-Qun Liu
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
63.Combined optimization of electrical and mechanical parameters of an out-of-plane gap-closing electrostatic Vibration Energy Harvester (VEH)

机译：结合电气和机械参数的优化，平面间隙关闭静电振动能量收割机（VAR）
- 作者：Raphael Guillemet;Philippe Basset;Dimitri Galayko;Tarik Bourouina
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
64.Static and Dynamic Mechanical Properties Measurement of Micro-Nano Metal Thin Film Using Cantilever Beam Deflection

机译：悬臂梁偏转微纳米金属薄膜的静态和动态力学性能
- 作者：Ya-Chi Cheng;Ming-Tzer Lin;Peng Chih Chen;Chi-Jia Tong
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
- Paddle cantilever beam;
- Dynamic behavior;
- Thin films;
- Mechanical behavior;
65.Technology of Microthermoforming of complex three-dimensional Parts with multiscale Features

机译：多尺度特征的复杂三维零件微热的技术
- 作者：Markus Heilig;Marc Schneider;Tim Ide;Matthias Worgull
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
66.Hot embossing of high performance polymers

机译：高性能聚合物的热压花
- 作者：M. Worgull;A. Kolew;M. Heilig;M. Schneider;H. Dinglreiter;B. Rapp
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
- Hot embossing;
- Semicrystalline polymers;
- PEEK;
- LCP;
- FEP;
- PSU;
67.Combining indirect microfluidic systems with polymer components manufactured from photocurable perfluoropolyethers

机译：将间接微流体系统与来自可光固化全氟聚醚制成的聚合物组分相结合
- 作者：Bastian E. Rapp;M. Worgull
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
68.Effect of Mechanical Properties Variation of Polysilicon on Microcantilever Mass Sensor Sensitivity

机译：多晶硅机械性能变化对微阳极岩质谱敏感性的影响
- 作者：M. Maroufi;Sh. Zihajehzadeh;M. Shamshirsaz;A. H. Rezaie
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
69.Thermal Behaviour of Thin Photoactive Layer Crystalline Solar Cells

机译：薄光活性层晶体电池的热行为
- 作者：B. Plesz;E. Bandy;A. Foldvary;V. Timai-Horvath;J. Mizsei
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
70.An Investigation of the Mechanical Behavior of a Microswitch Beam under Thermal and Electrostatic loading Including Cryogenic Effect

机译：热截面梁在热和静电负载下的力学行为的研究，包括低温效应
- 作者：Waleed F. Fans;H. M. Mohammed;Eng Kok Heng
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
71.Feasibility Study of a CMOS-Compatible Integrated Solar Photovoltaic Cell Array

机译：CMOS兼容集成太阳能光伏电池阵列的可行性研究
- 作者：B. Plesz;L. Juhasz;J. Mizsei
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
72.Neural Network Calibration of a Semiconductor Metal Oxide Micro Smell Sensor

机译：半导体金属氧化物微气味传感器的神经网络校准
- 作者：Reza Nadafi D.B.;Saman Nazari Nejad;Mansour Kabganian;Farshad Barazandeh
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
- Micro smell sensor;
- Neural Network;
- Error Backpropagation training;
- Gas sensing;
73.A study of package effects on the behavior of MEMS convective accelerometers

机译：包装对MEMS对流加速度计行为的影响
- 作者：A. A. Rekik;F. Azais;N. Dumas;M. Masmoudi;F. Mailly;P. Nouet
- 会议名称：《Symposium on Design, Test, Integration and Packaging of Micro-electromechanical Systems/Micro Optical Electro Mechanical Systems》 | 2010年
- MEMS;
- Convective accelerometer;
- Package influence;