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Atomic-scale thermocapillary flow in focused ion beam milling

机译：聚焦离子束铣削中的原子级热毛细管流

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Focused ion beams provide a means of nanometer-scale manufacturing and material processing, which is used for applications such as forming nanometer-scale pores in thin films for DNA sequencing. We investigate such a configuration with Ga+ bombardment of a Si thin-film target using molecular dynamics simulation. For a range of ion intensities in a realistic configuration, a recirculating melt region develops, which is seen to flow with a symmetrical pattern, counter to how it would flow were it driven by the ion momentum flux. Such flow is potentially important for the shape and composition of the formed structures. Relevant stress scales and estimated physical properties of silicon under these extreme conditions support the importance thermocapillary effects. A flow model with Marangoni forcing, based upon the temperature gradient and geometry from the atomistic simulation, indeed reproduces the flow and thus could be used to anticipate such flows and their influence in applications. (C) 2015 AIP Publishing LLC.
机译：聚焦离子束提供了纳米级制造和材料处理的手段，可用于诸如在DNA测序薄膜中形成纳米级孔的应用。我们使用分子动力学模拟研究了Ga轰击Si薄膜靶材的这种构型。在实际配置中，对于一定范围的离子强度，会形成一个循环熔体区，该熔体区以对称模式流动，这与离子动量通量驱动其流动的方式相反。对于形成的结构的形状和组成，这种流动潜在地重要。在这些极端条件下，硅的相关应力等级和估计的物理性质支持了重要的热毛细管效应。具有Marangoni强迫的流模型基于原子模拟的温度梯度和几何形状，确实可以重现该流，因此可以用来预测此类流及其在应用中的影响。 （C）2015 AIP Publishing LLC。

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