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Excitation of Ar lines in the cathode region of a dc discharge

机译:直流放电阴极区域中Ar线的激发

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摘要

Measurements of the spatial distribution of different Ar lines are reported for a flat cold cathode discharge in the j/P2 range of 10"4 to 10~2 A cm"2 mbar~2, where j is the current density and P is the pressure. In this range, excitation by heavy particles and by electrons can be studied since they produce a cathode glow and a negative glow that are well separated. With increasing j/P2 the heavy-particle excitation and the cathode glow increase, while the negative glow extends to a larger distance. The voltage, the pressure (P) times the lengths of the cathode glow and the cathode sheath, and the fraction of the input energy that goes into the negative glow and the cathode glow have a dependence on j/P2 that is independent of pressure. We also report data on the decay of the negative glow beyond its peak, but this decay length times pressure has a dependence on j/P2 that changes with pressure. The measured voltage and lengths are compared to previous data and to a recent calculation.
机译:报道了在j / P2范围为10“ 4到10〜2 A cm” 2 mbar〜2的平面冷阴极放电时,不同Ar线的空间分布的测量结果,其中j是电流密度,P是压力。在此范围内,可以研究重粒子和电子的激发,因为它们产生的阴极辉光和负辉光被很好地分开了。随着j / P2的增加,重粒子激发和阴极辉光增加,而负辉光延伸到更大的距离。电压,压力(P)乘以阴极辉光和阴极护套的长度,以及进入负辉光和阴极辉光的输入能量的比例取决于j / P2,而j / P2与压力无关。我们还报告了负辉光的衰减超过其峰值的数据,但是该衰减长度乘以压力对j / P2的依赖性随压力而变化。将测得的电压和长度与之前的数据和最新的计算结果进行比较。

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