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Laser applications in nanotechnology: Nanofabrication using laser ablation and laser nanolithography

机译:激光在纳米技术中的应用:使用激光烧蚀和激光纳米光刻的纳米加工

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摘要

The fact that nanoparticles and nanomaterials have fundamental properties different both from their constituent atoms or molecules and from their bulk counterparts has stimu-lated great interest, both theoretical and practical, in nanopar-ticles and nanoparticle-based assemblies (functional materials), with the result that these structures have become the subject of explosive research over the last twenty years or so. A great deal of progress in this field has relied on the use of lasers. In this paper, the directions followed and results obtained in laser nanotechnology research are reviewed. The parameters, proper-ties, and applications of nanoparticles are discussed, along with the physical and chemical methods for their fabrication and investigation. Nanofabrication applications of and fundamen-tal physical principles behind laser ablation and laser nanolitho-graphy are discussed in detail. The applications of laser radia-tion are shown to range from fabricating, melting, and evapor-ating nanoparticles to changing their shape, structure, size, and size distribution, through studying their dynamics and forming them into periodic arrays and various structures and assemblies. The historical development of research on nanoparticles and nanomaterials and the application of laser nanotechnology in various fields are briefly reviewed.
机译:纳米粒子和纳米材料的基本特性与其组成原子或分子以及本体的基本特性不同,这一事实激发了人们对纳米粒子和基于纳米粒子的组件(功能材料)的理论和实际兴趣。结果,这些结构已成为过去二十年来爆炸性研究的主题。该领域的许多进步都依赖于激光的使用。本文综述了激光纳米技术研究的方向和取得的成果。讨论了纳米粒子的参数,性质和应用,以及用于制备和研究的物理和化学方法。详细讨论了激光烧蚀和激光纳米平版印刷术的纳米加工应用和基本物理原理。通过研究纳米粒子的动力学并将其形成周期性阵列以及各种结构和组件,激光辐射的应用范围从制造,熔化和蒸发纳米粒子到改变其形状,结构,尺寸和尺寸分布。简要回顾了纳米粒子和纳米材料研究的历史发展以及激光纳米技术在各个领域的应用。

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