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Nonequilibrium 1/f~γ noise in conducting films and contacts

机译:导电膜和触点中的非平衡1 / f〜γ噪声

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摘要

Work on nonequilibrium flicker-noise (1/f~γ noise or NEFN) in conducting films of various materials and in thin-film contacts is reviewed. Experimental methods for studying nonequilibrium flicker fluctuations by separating NEFN from the total noise are suggested. Published results on NEFN in metal and alloy films, Ni/Cr-film and Ta_xN_y-film resistors, and contacts are systematized. It is shown that various kinds of NEFN occur in conducting films. Depending on test conditions, external influences, and the film microstructure, both stationary and non-stationary NEFNs are observed. The use of 1/f~γ noise measurements for nondestructively controlling the quality of thin-film conductors is substantiated. For most of the passive IC components (thin-film conductors, resistive layers, contacts), NEFN makes a much more informative quality indicator than equilibrium flicker-noise.
机译:综述了有关在各种材料的导电膜和薄膜触点中的非平衡闪烁噪声(1 / f〜γ噪声或NEFN)的工作。建议通过将NEFN与总噪声分离来研究非平衡闪烁波动的实验方法。有关金属和合金膜,Ni / Cr膜和Ta_xN_y膜电阻器以及触点的NEFN的公开结果已系统化。结果表明,在导电膜中会出现各种类型的NEFN。根据测试条件,外部影响和薄膜微结构,可以观察到静态和非静态NEFN。证实了使用1 / f〜γ噪声测量来无损控制薄膜导体的质量。对于大多数无源IC组件(薄膜导体,电阻层,触点),NEFN所提供的质量指标远高于均衡闪烁噪声。

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