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Electron and negative ion dynamics in electronegative cc-rf plasmas

机译：负电cc-rf等离子体中的电子和负离子动力学

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摘要

The line-integrated density of electrons and negative ions in asymmetric capacitively coupled oxygen rf plasmas are measured by 160.28 GHz microwave interferometry combined with simultaneous laser photodetachment. The high temporal resolution of the interferometer of 200 ns as well as an optimized phase shift resolution of about 0.016°allows the investigation of discharge regimes with rather low electron densities down to 5 × 10~(14) m~(-3), fast fluctuations in the electron density due to plasma instabilities, pulsed mode operation as well as laser photodetachment. Additionally phase resolved optical emission spectroscopy is applied to investigate the fundamental physics of the excitation dynamics in the electronegative plasmas oxygen and tetrafluoromethane due to electron impact excitation. Electrons are heated by the rf sheath expansion (γ-mode operation) and field reversal during sheath collapse. Secondary electrons are produced and heated during the expanded rf sheath (γ-mode operation) due to collisional detachment of negative ions and heavy particle bombardment of the electrode surface. Furthermore, the excitation due to fast heavy particle collisions in front of the electrode is discussed.
机译：非对称电容耦合氧rf等离子体中电子和负离子的线积分密度是通过160.28 GHz微波干涉仪与同时进行的激光光分离相结合来测量的。干涉仪的高时间分辨率为200 ns，优化的相移分辨率为约0.016°，这使得研究放电态的电子密度低至5×10〜（14）m〜（-3）的速度非常快。由于等离子体的不稳定性，脉冲模式操作以及激光光分离引起的电子密度波动。另外，将相分辨光发射光谱法用于研究由于电子冲击激发而在负电性等离子体氧和四氟甲烷中激发动力学的基本物理学。电子通过射频鞘层膨胀（γ模式操作）加热，并且在鞘层塌陷期间发生电场反转。由于负离子的碰撞脱离和电极表面的重粒子轰击，在扩展的rf护套（γ模式操作）期间产生并加热了二次电子。此外，讨论了由于电极前快速的重粒子碰撞而引起的激发。

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