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MODELING COMPLEX PROCESSABILITY CONSTRAINTS IN HIGH-MIX SEMICONDUCTOR MANUFACTURING

机译:高混合半导体制造中的复杂过程建模建模

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In semiconductor high-mix fabs, several technology nodes are run on the same line, using tool types from different generations. In this context, processability is a function defining which products can be processed on a given machine considering the current status of both the product and the machine. So in a high-mix context, having an information system that provides reliable information on processability and that can support the evolution of processability rules is fundamental. In this paper, we analyze the key elements for such a system. Based on the example of the implementation of fab constraints at STMicroelectronics' Crolles300 production unit, we illustrate the consequences of the integration of new processability rules and propose flexible and agile UML class diagrams enabling information system to meet evolution requirements. The approach is validated on real fab data, and its impact is discussed.
机译:在半导体高混合晶圆厂中,使用不同世代的工具类型,在同一条生产线上运行多个技术节点。在这种情况下,可加工性是一项功能,它考虑到产品和机器的当前状态,定义可以在给定机器上加工哪些产品。因此,在高度混合的情况下,拥有一个可提供有关可加工性的可靠信息并支持可加工性规则发展的信息系统是基础。在本文中,我们分析了这种系统的关键要素。以意法半导体(STMicroelectronics)的Crolles300生产单元的工厂约束实施示例为例,我们说明了集成新可加工性规则的后果,并提出了灵活而敏捷的UML类图,使信息系统能够满足发展要求。该方法已在真实的晶圆厂数据上得到验证,并对其影响进行了讨论。

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