Statistical process adjustment: A brief retrospective, current status, and some opportunities for further work

E. del Castillo

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Statistical process adjustment: A brief retrospective, current status, and some opportunities for further work

机译：统计过程调整：简短的回顾，当前状态以及进一步工作的一些机会

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The article provides a view of the origins and recent work in the area of SPA and discusses a few open problems, including some in semiconductor manufacturing process control. (59 refs.) Two distinctive characteristics of SPA are: 1. That the process responses relate to quality characteristics of a product (or process). 2. The implementation of the adjustments is not fully automatic, needing a higher-level supervisor.

机译：本文提供了SPA领域的起源和近期工作的观点，并讨论了一些未解决的问题，包括半导体制造过程控制中的一些问题。（参考文献59条）SPA的两个显着特征是：1.过程响应与产品（或过程）的质量特征有关。 2.调整的执行不是完全自动的，需要更高级别的主管。

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《Quality Control and Applied Statistics》 |2007年第3期|共2页
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E. del Castillo;
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正文语种 eng
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Statistical process adjustment: A brief retrospective, current status, and some opportunities for further work

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