Measurement of specimen thickness by phase change determination in TEM

M.D. Croitoru; D. Van Dyck; Y.Z. Liu

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Measurement of specimen thickness by phase change determination in TEM

机译：通过TEM中的相变确定来测量样品厚度

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A non-destructive method for measuring the thickness of thin amorphous films composed of light elements has been developed. The method employs the statistics of the phase of the electron exit wave function. The accuracy of this method has been checked numerically by the multislice method and compared with that based on the mean inner potential.

机译：已经开发出一种用于测量由轻元素构成的非晶薄膜的厚度的非破坏性方法。该方法利用电子出射波函数的相位统计。该方法的精度已通过多层方法进行了数值检验，并与基于平均内部电势的精度进行了比较。

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《Ultramicroscopy》 |2008年第12期|共7页
作者
M.D. Croitoru; D. Van Dyck; Y.Z. Liu;
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正文语种 eng
中图分类光学仪器;
关键词
Thickness measurement; Amorphous materials; Multislice simulation;

机译：厚度测量;非晶材料;多层模拟;

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专利

1. Measurement of specimen thickness by phase change determination in TEM [J] . M.D. Croitoru, D. Van Dyck, Y.Z. Liu Ultramicroscopy . 2008,第12期

机译：通过TEM中的相变确定来测量样品厚度
2. Precise electrical evaluation of active oxides thickness and comparison with TEM measurements [J] . Pellizzer F., Pavia G. Journal of Non-Crystalline Solids: A Journal Devoted to Oxide, Halide, Chalcogenide and Metallic Glasses, Amorphous Semiconductors, Non-Crystalline Films, Glass-Ceramics and Glassy Composites . 2001,第1a3期

机译：精确评估活性氧化物的厚度并与TEM测量结果进行比较
3. Determination of film thickness and refractive index in one measurement of phase-modulated ellipsometry [J] . Pristinski D, Kozlovskaya V, Sukhishvili SA Journal of the Optical Society of America, A. Optics, image science, and vision . 2006,第10期

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4. Speckle-interferometric measurement system of 3D deformation to obtain thickness changes of thin specimen under tensile loads [C] . Robert Kowarsch, Jiajun Zhang, Carmen Sguazzo, Conference on optical measurement systems for industrial inspection X . 2017

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5. Solid phase microextraction/thickness-shear mode resonator determinations of petroleum hydrocarbons in water [D] . Applebee, Michelle S. 2000

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7. Growth Rate Determination through Automated TEM Image Analysis:Crystallization Studies of Doped SbTe Phase-Change Thin Films [O] . Oosthoek Jasper L. M., Kooi Bart J., De Hosson Jeff T. M., 2010

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Measurement of specimen thickness by phase change determination in TEM

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